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A kind of manufacturing method of n-type bifacial battery

A technology of double-sided battery and manufacturing method, which is applied in the direction of circuits, photovoltaic power generation, electrical components, etc., can solve the problems of expensive ion implantation equipment, high production cost, and large damage to silicon wafers, so as to reduce the diffusion "dead layer" and reduce damage and pollution, and the effect of improving battery efficiency

Active Publication Date: 2018-07-13
JIANGSU FOCUS NEW ENERGY TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Process a has the problem of many process steps, and needs to be etched twice, which will cause relatively large damage to the silicon wafer, and is likely to cause poor appearance, and the production cost is high; the ion implantation equipment used in process b is expensive and single-chip The process and production capacity are limited, the production cost is higher, and high temperature annealing treatment above 600°C is required after ion implantation. There are many process steps and high temperature treatment will cause damage to the silicon wafer, making the silicon wafer fragile

Method used

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  • A kind of manufacturing method of n-type bifacial battery

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Embodiment 1

[0034] A method for manufacturing an N-type double-sided battery, including performing pre-processing on an N-type single crystal silicon substrate, performing boron diffusion on the surface of the silicon substrate, performing wet etching on the silicon substrate and cleaning borosilicate glass, Diffusion of phosphorus on the back of the silicon substrate, cleaning of the silicon substrate to remove phosphorus silicon glass, growth of passivation layer and deposition of anti-reflection layer on the front and back of the silicon substrate, preparation of positive and negative electrodes of the battery, and completion of N-type double-sided The production of the battery; the specific steps are as follows:

[0035] (1) Perform pre-process treatment on the N-type monocrystalline silicon substrate: take an N-type monocrystalline silicon substrate with a resistivity of 1Ω·cm, and clean the surface of the silicon substrate with a mixed solution of hydrogen peroxide and sodium hydroxi...

Embodiment 2

[0044] A method for manufacturing an N-type double-sided battery, including performing pre-processing on an N-type single crystal silicon substrate, performing boron diffusion on the surface of the silicon substrate, performing wet etching on the silicon substrate and cleaning borosilicate glass, Diffusion of phosphorus on the back of the silicon substrate, cleaning of the silicon substrate to remove phosphorus silicon glass, growth of passivation layer and deposition of anti-reflection layer on the front and back of the silicon substrate, preparation of positive and negative electrodes of the battery, and completion of N-type double-sided The production of the battery; the specific steps are as follows:

[0045] (1) Pre-processing the N-type monocrystalline silicon substrate: take an N-type monocrystalline silicon substrate with a resistivity of 1.5Ω·cm, and clean the surface of the silicon substrate with a mixed solution of hydrogen peroxide and sodium hydroxide; then Using ...

Embodiment 3

[0054] A method for manufacturing an N-type double-sided battery, including performing pre-processing on an N-type single crystal silicon substrate, performing boron diffusion on the surface of the silicon substrate, performing wet etching on the silicon substrate and cleaning borosilicate glass, Diffusion of phosphorus on the back of the silicon substrate, cleaning of the silicon substrate to remove phosphorus silicon glass, growth of passivation layer and deposition of anti-reflection layer on the front and back of the silicon substrate, preparation of positive and negative electrodes of the battery, and completion of N-type double-sided The production of the battery; the specific steps are as follows:

[0055] (1) Perform pre-process treatment on the N-type monocrystalline silicon substrate: take an N-type monocrystalline silicon substrate with a resistivity of 2Ω·cm, and clean the surface of the silicon substrate with a mixed solution of hydrogen peroxide and sodium hydroxi...

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Abstract

The invention discloses a method of making an N-type double-sided battery. The method comprises the following steps: carrying out a front process on an N-type single-crystal silicon substrate; diffusing boron on the surface of the silicon substrate; carrying out wet etching and deboration silicon glass cleaning on the silicon substrate; diffusing phosphorus on the back of the silicon substrate; carrying out dephosphorization silicon glass cleaning on the silicon substrate; growing a passivation layer and depositing an antireflection layer on the front and back of the silicon substrate; and preparing positive and negative electrodes, thus completing the making of an N-type double-sided battery. The technical process from boron diffusion to phosphorus diffusion is simple in operation, and involves fewer steps. The use of conventional equipment can be maximized in production. Damage and pollution to the silicon substrate are reduced. The battery efficiency can be improved. Therefore, the cost of production is reduced significantly, and large-scale industrial production of the N-type battery is facilitated.

Description

technical field [0001] The invention relates to a production method of a solar battery, in particular to a production method of an N-type double-sided battery. Background technique [0002] N-type crystalline silicon cells are a type of solar cells. Compared with conventional P-type cells, N-type cells have the advantages of longer life, less light-induced attenuation, and better response to weak light, and have greater room for efficiency improvement. At the same time, N-type batteries can be made into double-sided light-transmitting batteries. In addition to absorbing light on the front side, the back side can also absorb ambient light to increase power output, making the power generation of the entire system higher. Therefore, it is regarded as a new generation of high-efficiency batteries. An important development direction of solar cells. [0003] In order to obtain a PN junction on the front and an N+ back electric field layer on the back, both the front and back of t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L31/18H01L31/068H01L21/223H01L21/228
CPCH01L21/223H01L21/228H01L31/0684H01L31/1804Y02E10/547Y02P70/50
Inventor 马建峰刘强
Owner JIANGSU FOCUS NEW ENERGY TECH
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