Silicon-based cantilever beam coupled direct-heating type millimeter-wave signal detecting instrument

Abstract

The invention discloses a silicon-based cantilever beam coupled direct-heating type millimeter-wave signal detecting instrument which is composed of a sensor module an analog / digital conversion module and a liquid crystal display module. The sensor module is composed of a cantilever beam coupled structure, a power divider / combiner, a direct-heating type microwave power sensor and a switch, a substrate material is high-resistance Si, and the power is detected by the direct-heating type microwave power sensor at a CPW signal line terminal corresponding to an input port; frequency detection is realized by measuring synthesis power of two paths of coupling signals with a phase difference of 90 degrees at the central frequency by utilizing the direct-heating type microwave power sensor; and phase detection is realized by respectively combining the two paths of the coupling signals with the phase difference of 90 degrees at the central frequency with two paths of equally divided reference signals, detecting the synthesis power by utilizing the direct-heating type microwave power sensor and obtaining the phase of a to-be-detected signal. The analog / digital conversion is realized by an MCS51 single-chip, and the liquid crystal display part is composed of three liquid crystal display screens.

Description

technical field [0001] The invention provides a silicon-based cantilever beam coupled direct heating millimeter-wave signal detection instrument, which belongs to the technical field of micro-electro-mechanical systems (MEMS). Background technique [0002] Millimeter waves belong to microwaves in the higher frequency band, and are of great significance in communication, radar, guidance, remote sensing technology, radio astronomy, clinical medicine and spectroscopy. As the three basic parameters of microwave signals, the detection of power, frequency and phase plays an important role in millimeter wave systems. Based on the continuous development and maturity of MEMS technology, many electronic components and mechanical components have been successfully miniaturized, and their performance is no less than that of traditional components, and microwave signal detectors are no exception. However, currently existing microwave signal detectors, including power detectors, frequency...

AI Technical Summary

Problems solved by technology

However, currently existing microwave signal detectors, including power detectors, frequency detectors and phase detectors, are relatively independent devices, and in microwave systems where power, phase and frequency need to be measured simultaneously, independent devices The size of the circuit is relatively large, and there are electromagnetic compatibility problems at the same time, so the research on the integrated detection system of millimeter wave signals has become the trend of future development.

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