A kind of manufacturing method of light-emitting diode epitaxial wafer
A technology of light-emitting diodes and manufacturing methods, which is applied to semiconductor devices, electrical components, circuits, etc., can solve the problems of large energy band bending, enhanced polarization effect, and small carrier confinement, so as to improve crystal quality and reduce V type dislocation and linear dislocation, reducing the effect of polarization effect
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[0027] The embodiment of the present invention provides a method for manufacturing a light-emitting diode epitaxial wafer, using high-purity hydrogen (H 2 ) or nitrogen (N 2 ) as carrier gas, trimethylgallium (TMGa), trimethylaluminum (TMAl), trimethylindium (TMIn) and ammonia (NH 3 ) as Ga, Al, In and N sources respectively, with silane (SiH 4 ), Magnesium (Cp 2 Mg) as N and P type dopants respectively. see figure 1 , the manufacturing method includes:
[0028] Step 200: Put the substrate at 1200°C in H 2 The heat treatment was performed for 10 minutes under the atmosphere.
[0029] In this embodiment, the substrate can be sapphire, Si or SiC.
[0030] It should be noted that heat treatment can clean the surface of the substrate.
[0031] Step 201: Control the growth temperature to 500-650° C., the growth pressure to 400-600 Torr, and the V / III ratio to 500-3000, grow a low-temperature buffer layer with a thickness of 15-35 nm on the substrate, and control the growth ...
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