Dust removal nozzle and dust removal device

Abstract

PROBLEM TO BE SOLVED: To provide a dust removing nozzle capable of intensively and efficiently cleaning the small area portion of a sensor and the like required for ultra-high cleanliness in electronic components.SOLUTION: A dust removing nozzle where an electronic component partly provided with a dedusting-needed small area portion required for ultra-high cleanliness is cleaned by air includes: air jetting holes 3 jetting air toward the inside of the outline L of the dedusting-needed small area portion; and air suction holes 4 arranged so as to surround the air jetting holes 3 and suctioning air at the outside of the outline of the dedusting-needed small area portion.SELECTED DRAWING: Figure 1

Description

technical field [0001] The invention relates to a dust removal nozzle and a dust removal device. Background technique [0002] For example, small (small) electronic components including CMOS image sensors, CCD image sensors, etc. are arranged in multiple rows on printed circuit boards or cassette trays, and flow on the production line. [0003] The above-mentioned small parts in (small) electronic components are parts where ultra-high cleanliness is particularly required. Conventionally, there is known a dust removal device that removes foreign matter such as dust and fine particles adhering to the above-mentioned small surface area by blowing out or sucking gas (see Patent Document 1). [0004] Patent Document 1: Japanese Patent Laid-Open No. 2014-100622. [0005] However, the conventional dust remover removes dust and cleans dust by blowing gas to parts other than the above-mentioned small face parts by a horizontally long cleaning head (dust removal head) that correspon...

AI Technical Summary

Problems solved by technology

Due to the consumption of excess air in parts other than the small face, there is a disadvantage that the cleaning efficiency of the important small face that most needs dust removal is reduced

In addition, in general, there are many ultra-thin wires with a diameter of tens of microns outside the small surface, and the ultra-thin wires may be disconnected or damaged by blowing high-pressure and high-speed gas.

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