Method for producing silylene film through mechanical stripping, and application of silylene film
A mechanical peeling, silicene technology, applied in chemical instruments and methods, inorganic chemistry, silicon compounds, etc., can solve problems such as being unsuitable for large-scale industrial production, high cost of silicene, increasing metal films and substrate materials, etc. Environmental friendliness, less environmental pollution, and the effect of reducing production costs
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Embodiment 1
[0042] Such as figure 1 As shown, the method steps of the silicene film prepared by mechanical peeling in the present invention are as follows:
[0043] (1) Select a Si (111) silicon wafer with a diameter of 50 mm and a thickness of 0.1 mm as the silicon source, wash it with SPM solution at a temperature of 80 °C for 5 minutes, rinse it with deionized water, and then ultrasonicate it in HF solution for 1 Minutes to remove the silicon oxide on the surface of the silicon wafer, and finally rinse with deionized water to remove the residual HF liquid, and dry the surface of the silicon wafer with hot nitrogen. Among them, the SPM solution is H 2 SO 4 :H 2 o 2 =1:4 strong oxidizing solution, the concentration of HF solution is 3.5%, the hot nitrogen is nitrogen with a purity of 99.9%, and the temperature is 80°C.
[0044] (2) Take out the processed Si wafer and put it into a vacuum chamber. The temperature of the Si wafer is at room temperature, and the background vacuum degre...
Embodiment 2
[0050] (1) Select a Si (111) silicon wafer with a diameter of 70 mm and a thickness of 0.2 mm as the silicon source, wash it with SPM solution at a temperature of 80 °C for 5 minutes, rinse it with deionized water, and then ultrasonicate it in HF solution for 1 Minutes to remove the silicon oxide on the surface of the silicon wafer, and finally rinse with deionized water to remove the residual HF liquid, and dry the surface of the silicon wafer with hot nitrogen. Among them, the SPM solution is H 2 SO 4 :H 2 o 2 =1:4.5 strong oxidizing solution, the concentration of HF solution is 4%, the hot nitrogen is nitrogen with a purity of 99.9%, and the temperature is 85°C.
[0051] (2) Take out the processed Si wafer and put it into a vacuum chamber. The temperature of the Si wafer is at room temperature, and the background vacuum degree of the coating is 1.0×10 -3 Pa, using resistance wire evaporation, using a crystal oscillator to monitor the coating process, setting the evapora...
Embodiment 3
[0057] (1) Select a Si (111) silicon wafer with a diameter of 80 mm and a thickness of 0.25 mm as the silicon source, wash it with SPM solution at a temperature of 80 °C for 5 minutes, rinse it with deionized water, and then ultrasonicate it in HF solution for 1 Minutes to remove the silicon oxide on the surface of the silicon wafer, and finally rinse with deionized water to remove the residual HF liquid, and dry the surface of the silicon wafer with hot nitrogen. Among them, the SPM solution is H 2 SO 4 :H 2 o 2 =1:5 strong oxidizing solution, the concentration of HF solution is 4.5%, the hot nitrogen is nitrogen with a purity of 99.9%, and the temperature is 85°C.
[0058] (2) Take out the processed Si wafer and put it into a vacuum chamber. The temperature of the Si wafer is at room temperature, and the background vacuum degree of the coating is 1.0×10 -3 Pa, using sputtering method for coating, using Mo metal target, using a crystal oscillator to monitor the coating pr...
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