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High-efficiency and high-brightness vacuum ultraviolet light source apparatus

A vacuum ultraviolet light source and high-brightness technology, applied to lamp parts, gas plasma lamps, etc., can solve the problems of weak intensity and low luminous efficiency, achieve the effects of small size, reduce safety hazards, and improve practicality and stability

Active Publication Date: 2017-03-01
FERMION INSTR SHANGHAI CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0008] In order to solve the common problems of low luminous efficiency and weak intensity in existing vacuum ultraviolet light source devices, the present invention discloses a high-efficiency and high-brightness vacuum ultraviolet light source device. The technical solution of the present invention is implemented as follows:

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Embodiment Construction

[0047]The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0048] The invention is a high-efficiency and high-brightness vacuum ultraviolet light source device, and the energy of ultraviolet light emitted by it in a vacuum environment is mainly between 6 and 50eV.

[0049] Words such as up, down, top, and bottom are used herein to facilitate the description of the structure of each component, the connection relationship and positional relationship between the components in conjunction with the accompanying drawings, and to e...

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Abstract

The invention provides a high-efficiency and high-brightness vacuum ultraviolet light source apparatus. The apparatus comprises a plasma retainer, a radio frequency electric field focuser, and a sealing fixing device. According to the apparatus, a high-density radio frequency electric field (the intensity of the electric field can reach 107 V / m) is formed in a local space by employing a plasma local field principle, ionization excitation of plasma can be directly performed without a conventional ignition device, the system is simplified, and the practicality and the stability are improved; the ultraviolet light light-emitting intensity above the grade of 10<18> photons / (Sr*S) can be realized through reasonable configuration of dimension parameters and air-inlet parameters of the radio frequency electric field focuser and the plasma retainer; the apparatus is free of the conventional working gas, various different working gases can be used, and the energy of the emitted ultraviolet light can cover 6-50 eV; and the ultra-long service lifetime of more than 10,000 hours can be provided.

Description

technical field [0001] The invention relates to the field of ultraviolet light source equipment, in particular to a high-efficiency and high-brightness vacuum ultraviolet light source device. Background technique [0002] Research on photoelectron energy spectrum and mass spectrometry of vacuum ultraviolet light source in scientific research; ultraviolet lithography in microelectronics and optoelectronic technology; photosynthesis, photocuring, and photooxidation in chemical industry; sterilization, disinfection, treatment of skin diseases in food and medical treatment, and public security investigation Identification and other fields have a wide range of applications. [0003] The existing vacuum ultraviolet light source devices are generally divided into several types according to the mechanism of ultraviolet light generation, such as high-voltage electrode discharge, microwave waveguide resonant cavity coupling, and inductive coil coupling. However, the above-mentioned de...

Claims

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Application Information

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IPC IPC(8): H01J63/08H01J63/02
CPCH01J63/02H01J63/08
Inventor 谢英英欧宏炜
Owner FERMION INSTR SHANGHAI CO LTD
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