A solid lubricating composite coating on the surface of a substrate and its preparation method
A composite coating, solid lubrication technology, applied in the direction of coating, metal material coating process, vacuum evaporation plating, etc., can solve the problem of difficult to meet the protection, high friction coefficient, achieve excellent self-lubricating characteristics, low shear Stress, the effect of reducing the coefficient of friction
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment 1
[0053] In this embodiment, the substrate is a titanium alloy ball valve, the hard sealing surface of the substrate is a Cr transition layer, and the surface of the Cr transition layer is a CrC / a-C composite coating. The preparation method of this composite coating is specifically as follows:
[0054] (1) Pre-plating treatment
[0055] Put the substrate in petroleum ether, and use ultrasonic stirring to clean it for 15 minutes. After removing the oil on the surface of the substrate, put it into acetone and ultrasonically clean it for 15 minutes, then ultrasonically clean it in absolute ethanol for 15 minutes, and finally take it out and dry it with nitrogen;
[0056] (2) Bias reverse sputter cleaning
[0057] Put the substrate treated in step (1) into the multi-arc ion plating chamber, the temperature of the chamber is 350°C, and the back vacuum is pre-evacuated to 4.00×10 -3 Pa; then, pass Ar gas with a purity greater than or equal to 99.999% into the cavity, the Ar gas flow...
Embodiment 2
[0068] In this embodiment, the substrate is exactly the same as that in Embodiment 1. Same as Embodiment 1, the hard sealing surface of the substrate is a Cr transition layer, and the surface of the Cr transition layer is a CrC / a-C composite coating.
[0069] The preparation method of this composite coating is specifically as follows:
[0070] (1) is identical with the step (1) in embodiment 1;
[0071] (2) same as step (2) in embodiment 1;
[0072] (3) same as step (3) in embodiment 1;
[0073] (4) Deposition of CrC / a-C composite coating
[0074] Keep the Ar gas flow constant, and then pass C with a purity greater than or equal to 99.9% into the cavity 2 h 2 As a reaction gas, the flow rate is 100sccm, and the vacuum degree is maintained at 1.20Pa; the Cr target current is increased to 65A, the deposition temperature is maintained at 400°C, and a -150V bias is applied to the substrate to deposit a CrC / a-C composite coating on the surface of the substrate. Time 120min. ...
Embodiment 3
[0081] In this embodiment, the substrate is exactly the same as that in Embodiment 1. Same as Embodiment 1, the hard sealing surface of the substrate is a Cr transition layer, and the surface of the Cr transition layer is a CrC / a-C composite coating.
[0082] The preparation method of this composite coating is specifically as follows:
[0083] (1) is identical with the step (1) in embodiment 1;
[0084] (2) same as step (2) in embodiment 1;
[0085] (3) same as step (3) in embodiment 1;
[0086] (4) Deposition of CrC / a-C composite coating
[0087] Keep the Ar gas flow constant, and then pass C with a purity greater than or equal to 99.9% into the cavity 2 h 2 As a reaction gas, the flow rate is 150sccm, and the vacuum degree is maintained at 1.40Pa; the Cr target current is increased to 65A, the deposition temperature is maintained at 400°C, and a -150V bias is applied to the substrate to deposit a CrC / a-C composite coating on the surface of the substrate. Time 120min. ...
PUM
Property | Measurement | Unit |
---|---|---|
hardness | aaaaa | aaaaa |
hardness | aaaaa | aaaaa |
hardness | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com