Pyrolysis boron nitride crucible and preparing method thereof
A boron nitride crucible, pyrolysis technology, applied in gaseous chemical plating, metal material coating process, coating and other directions, can solve the problem of increasing cost, affecting the quality and yield of single crystal growth, affecting product quality and performance And other issues
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[0021] The invention provides a kind of preparation method of pyrolytic boron nitride crucible, comprising the following steps:
[0022] A) Boron-containing gaseous compound and nitrogen-containing gas carry out chemical vapor deposition reaction on the heated mold under vacuum conditions to obtain a precoat;
[0023] B) after obtaining the precoat, stop the chemical vapor deposition reaction and keep the constant temperature;
[0024] C) after the constant temperature is maintained, the chemical vapor deposition reaction is continued to obtain a pyrolytic boron nitride crucible with a pre-coat;
[0025] D) removing the precoat to obtain a pyrolytic boron nitride crucible.
[0026] In the present invention, before performing step A), preferably, the mold is heated first to obtain a heated mold. The heating of the mold is preferably carried out according to the following method:
[0027] The mold is placed in the reaction chamber, vacuumized and heated to obtain a heated mol...
Embodiment 1
[0045] The matrix graphite mold is installed on the rotating device, placed in the vapor deposition reaction chamber, the furnace cover is closed, and the temperature is raised by vacuuming. When the temperature reaches 1900°C and the vacuum degree is less than 10Pa, keep it warm for 1h. Then, with nitrogen as the carrier and shielding gas, the BCl 3 and NH 3 According to the volume ratio of 2:1, it is passed into the vapor deposition reaction chamber to carry out the chemical vapor deposition reaction. The vacuum degree of the vapor deposition reaction chamber is 50Pa; the temperature of the chemical vapor deposition reaction is 1900 ° C, and the time is 1.5h. Boron nitride pre-coating, the thickness of which is 0.08mm.
[0046] Then, stop feeding BCl 3 and NH 3 , keep warm for 1h under the condition of constant vacuum. Afterwards, continue with the BCl 3 and NH 3 According to the volume ratio of 2:1, it is passed into the vapor deposition reaction chamber, and the che...
Embodiment 2
[0052] The matrix graphite mold is installed on the rotating device, placed in the vapor deposition reaction chamber, the furnace cover is closed, and the temperature is raised by vacuuming. When the temperature reaches 1850°C and the vacuum degree is less than 10Pa, keep it warm for 1h. Then, with nitrogen as the carrier and shielding gas, the BCl 3 and NH 3 According to the volume ratio of 2:1, it is passed into the vapor deposition reaction chamber for chemical vapor deposition reaction. The vacuum degree of the vapor deposition reaction chamber is 50Pa; the temperature of the chemical vapor deposition reaction is 1850°C, and the time is 1h. Boron nitride pre-coating, the thickness of which is 0.06mm.
[0053] Then, stop feeding BCl 3 and NH 3 , and keep warm for 1h, after that, continue to add BCl 3 and NH 3 According to the volume ratio of 2:1, it is passed into the vapor deposition reaction chamber, and the chemical vapor deposition reaction is carried out on the p...
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