Pyrolysis boron nitride crucible and preparing method thereof

A boron nitride crucible, pyrolysis technology, applied in gaseous chemical plating, metal material coating process, coating and other directions, can solve the problem of increasing cost, affecting the quality and yield of single crystal growth, affecting product quality and performance And other issues

Inactive Publication Date: 2017-02-08
FIRST RARE MATERIALS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since the compound formed after pyrolysis is directly deposited on the graphite mold as the substrate, and there are graphite powder and pores invisible to the naked eye on the surface of the graphite mold during the polishing process, it will inevitably affect the quality of the pyrolytic boron nitride crucible. Inner surface, which affects the quality and performance of the product, and then affects the quality and yield of single crystal growth, increasing the cost

Method used

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Examples

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Effect test

preparation example Construction

[0021] The invention provides a kind of preparation method of pyrolytic boron nitride crucible, comprising the following steps:

[0022] A) Boron-containing gaseous compound and nitrogen-containing gas carry out chemical vapor deposition reaction on the heated mold under vacuum conditions to obtain a precoat;

[0023] B) after obtaining the precoat, stop the chemical vapor deposition reaction and keep the constant temperature;

[0024] C) after the constant temperature is maintained, the chemical vapor deposition reaction is continued to obtain a pyrolytic boron nitride crucible with a pre-coat;

[0025] D) removing the precoat to obtain a pyrolytic boron nitride crucible.

[0026] In the present invention, before performing step A), preferably, the mold is heated first to obtain a heated mold. The heating of the mold is preferably carried out according to the following method:

[0027] The mold is placed in the reaction chamber, vacuumized and heated to obtain a heated mol...

Embodiment 1

[0045] The matrix graphite mold is installed on the rotating device, placed in the vapor deposition reaction chamber, the furnace cover is closed, and the temperature is raised by vacuuming. When the temperature reaches 1900°C and the vacuum degree is less than 10Pa, keep it warm for 1h. Then, with nitrogen as the carrier and shielding gas, the BCl 3 and NH 3 According to the volume ratio of 2:1, it is passed into the vapor deposition reaction chamber to carry out the chemical vapor deposition reaction. The vacuum degree of the vapor deposition reaction chamber is 50Pa; the temperature of the chemical vapor deposition reaction is 1900 ° C, and the time is 1.5h. Boron nitride pre-coating, the thickness of which is 0.08mm.

[0046] Then, stop feeding BCl 3 and NH 3 , keep warm for 1h under the condition of constant vacuum. Afterwards, continue with the BCl 3 and NH 3 According to the volume ratio of 2:1, it is passed into the vapor deposition reaction chamber, and the che...

Embodiment 2

[0052] The matrix graphite mold is installed on the rotating device, placed in the vapor deposition reaction chamber, the furnace cover is closed, and the temperature is raised by vacuuming. When the temperature reaches 1850°C and the vacuum degree is less than 10Pa, keep it warm for 1h. Then, with nitrogen as the carrier and shielding gas, the BCl 3 and NH 3 According to the volume ratio of 2:1, it is passed into the vapor deposition reaction chamber for chemical vapor deposition reaction. The vacuum degree of the vapor deposition reaction chamber is 50Pa; the temperature of the chemical vapor deposition reaction is 1850°C, and the time is 1h. Boron nitride pre-coating, the thickness of which is 0.06mm.

[0053] Then, stop feeding BCl 3 and NH 3 , and keep warm for 1h, after that, continue to add BCl 3 and NH 3 According to the volume ratio of 2:1, it is passed into the vapor deposition reaction chamber, and the chemical vapor deposition reaction is carried out on the p...

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Abstract

The invention provides a preparing method of a pyrolysis boron nitride crucible. The disclosed method is easy to operate, secondary temperature rise does not exist, the error rate of worker operation is reduced, and manpower and time are saved. The pyrolysis boron nitride crucible provided with a pre-coating and obtained through the above method is easy to demold, after demolding, gas is used for sweeping the inner wall of the crucible, the pyrolysis boron nitride pre-coating can easily fall off, the inner surface of the obtained pyrolysis boron nitride crucible is clean and smooth, and secondary grinding is not needed; and damage to the inner wall of the pyrolysis boron nitride crucible in the grinding process is avoided, and the performance and quality of the pyrolysis boron nitride crucible are effectively improved. Meanwhile, a mold is easy to clean, abrasion is not likely to happen, and therefore the number of using times of the mold is large, and the replacing cost is low.

Description

technical field [0001] The invention belongs to the technical field of chemical vapor deposition, and in particular relates to a pyrolytic boron nitride crucible and a preparation method thereof. Background technique [0002] Due to the high stability and excellent physical and chemical properties of boron nitride, boron nitride products are indispensable tools in the preparation of many new materials in the high-tech field. The pyrolytic boron nitride crucible prepared by chemical vapor deposition method is not compatible with most molten metals, semiconductors and other materials at high temperatures because of its compact surface, good air tightness, high temperature resistance, acid, alkali, salt and organic reagents. Wet and non-reactive, so it is usually used as a container or base in vertical gradient solidification (VGF), molecular beam epitaxy (MBE) or in situ synthesis (LEC) of semiconductor materials, for example: gallium arsenide single crystal material The prep...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/34C23C16/44
CPCC23C16/342C23C16/44
Inventor 胡丹朱刘张贵林
Owner FIRST RARE MATERIALS CO LTD
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