short arc discharge lamp

Abstract

The present invention provides a short-arc discharge lamp with the following structure. A heat transfer body is enclosed in the closed space formed by the electrodes positioned vertically above, and a restricting body is provided. Extended and radially cross-sectioned sheet material restricts the convection of the molten heat transfer body to rotate in the circumferential direction. In this short-arc discharge lamp, when the molten heat transfer body convects when the lamp is turned on, the convection is suppressed in a closed space The inside rotates in the circumferential direction, and the plate does not act on the inner wall of the closed space, especially the inner wall on the rear side of the electrode, so as to prevent the electrode from being damaged. The above-mentioned plate is characterized in that the side edge of the inner wall side of the electrode forming the closed space is inclined, and the length of the upper edge of the plate from the center axis of the electrode to the end in the radial direction is set to be smaller than that of the lower edge. The length from the central axis of the electrode to the end in the radial direction.

Description

technical field [0001] The present invention relates to a short-arc discharge lamp, and more particularly to a short-arc discharge lamp having an electrode in which a heat transfer body is sealed in a closed space of an electrode body. Background technique [0002] Conventionally, in short-arc discharge lamps used as ultraviolet irradiation light sources for exposure devices such as semiconductor substrates, liquid crystal substrates for liquid crystal displays, and printed circuit boards, the increase in output has been increasing. When the rated power consumption increases due to the increase in output, there arises a problem that the current value flowing through the lamp generally increases, thereby increasing the amount of electron impacts received by the electrodes, which tends to heat up and melt. [0003] In addition, there is also a problem that the material constituting the electrodes, such as tungsten, evaporates and adheres to the inner surface of the arc tube to...

AI Technical Summary

Problems solved by technology

When the rated power consumption increases due to the increase in output, there is a problem that the value of the current flowing through the lamp generally increases, and thus the electrode receives a large amount of electron impact, and the temperature rises and melts easily.

[0012] The tip side (lower side) of the electrode is in a higher temperature state. Since it is relatively ductile, it is resistant to the pressure of the melting heat transfer body and the pushing action of the restricting body. The rear side of the electrode in a lower temperature state (Upper side) Lack of ductility, cracks may occur due to the pressure of the molten heat transfer body and the pressing force of the restrictor

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