Production method of gold-doped vanadium dioxide nanosheet structured room temperature CH4 gas-sensitive sensor
A vanadium dioxide nanometer and gas sensor technology, which is applied in the direction of instruments, scientific instruments, measuring devices, etc., can solve the problems of high sensor operating temperature, short response recovery time, and inability to realize low-concentration detection, and achieve short response recovery time , easy to operate, beneficial to the effect of adsorption and diffusion
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Embodiment 1
[0031] (1) Cleaning of ceramic substrates
[0032] Cut a ceramic sheet with a size of 2cm*2cm into two rectangular pieces with a size of 2cm*1cm, then put a complete and a cut ceramic sheet into a glass, and ultrasonically clean them in acetone and ethanol respectively for 5 ~20 minutes, after cleaning, take out the ceramic substrate and blow off the liquid on the surface of the substrate with a suction ball, after absorbing the liquid, put it on the filter paper and dry it in a vacuum oven at 60-80°C for 5-10 minutes for later use;
[0033] (2) Weigh V 2 o 5 powder
[0034] Weigh 0.15g V 2 o 5 powder spare;
[0035] (3) Preparation of vanadium dioxide nanosheets by single gas phase transport method
[0036] V of step (2) 2 o 5 Spread the powder evaporation source evenly on the 2cm*2cm ceramic substrate in step (1), and put it into the quartz tube as a whole, and then place it at a distance of V 2 o 5 Place a 2cm*1cm ceramic substrate in step (1) at 0.5cm of the powd...
Embodiment 2
[0045] The difference between this embodiment and Example 1 is: the deposition pressure of the vanadium dioxide nanosheets in step (3) is 1Torr, and the gas sensor element with the gold-doped vanadium dioxide nanosheets structure is at room temperature to 500ppm CH 4 Gas sensitivity is 58%.
Embodiment 3
[0047] The difference between this embodiment and Example 1 is that the deposition pressure of vanadium dioxide nanosheets in step (3) is 2Torr, and the prepared gold-doped vanadium dioxide nanosheet structure gas sensor element is at room temperature to 500ppm CH 4 Gas sensitivity is 60%.
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