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Bimetallic/ceramic composite film and preparation method thereof

A technology of ceramic composite and ceramic composite layer, applied in metal material coating process, ion implantation coating, coating and other directions, to achieve the effect of maintaining stable optical properties and improving thermal stability

Active Publication Date: 2016-11-30
NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

On the basis of not affecting its physical and optical properties as much as possible, the work of using segregation and passivation driven by thermal diffusion in the bimetallic nanoparticle system to improve its thermal stability has not yet been carried out.

Method used

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  • Bimetallic/ceramic composite film and preparation method thereof
  • Bimetallic/ceramic composite film and preparation method thereof
  • Bimetallic/ceramic composite film and preparation method thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0043] Place the quartz wafer and (100) single crystal silicon wafer to be plated in the deposition chamber, pre-evacuate, and the background vacuum is 2×10 - 4 Pa, heat the quartz sheet and (100) single crystal silicon sheet to make the temperature 150°C, and at the same time, pass in Ar gas to increase the pressure of the vacuum chamber to 0.49Pa, keep it warm for 40min for desorption, and remove the impurities physically adsorbed on the surface of the substrate , which is conducive to improving the bonding force between the film and the substrate; then close the introduction of Ar gas, and re-pump the deposition chamber to 2×10 -4 Pa, and Ar gas was fed again to increase the pressure of the deposition chamber to 0.49Pa; turn on the RF bias of the substrate, set its power to 80W and glow, sputter for 5min, and further clean the surface of the substrate; turn off the cleaning bias and Turn on the RF driving power of the alumina target, adjust its power to 120W, and pre-sputt...

Embodiment 2

[0049] Place the quartz plate to be plated in the deposition chamber, pre-evacuate, and the background vacuum is 1.2×10 -4 Pa, heat the quartz substrate to a temperature of 150°C, and at the same time pass in Ar gas to increase the pressure of the deposition chamber to 0.49Pa, keep it warm for 40 minutes for desorption, and remove physically adsorbed impurities on the surface of the substrate, which is beneficial to enhance the film and substrate The binding force between the sheets; then close the flow of Ar gas, and re-pump the deposition chamber to 1.2×10 -4 Pa, and Ar gas was fed again to increase the pressure of the deposition chamber to 0.49Pa; turn on the RF bias of the substrate, set its power to 80W and glow, sputter for 5min, and further clean the surface of the substrate; turn off the cleaning bias and Turn on the RF driving power of the alumina target, adjust its power to 120W, and pre-sputter for 70 minutes. At the same time, turn on the driving power of the W tar...

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Abstract

The invention discloses a bimetallic / ceramic composite film, which is composed of bimetallic particles and a ceramic phase. The bimetallic particles are embedded in the ceramic phase to form a bimetallic / ceramic composite layer. The bimetallic particles are WAl or WTi. The matrix element is aluminium oxide or silicon dioxide. The invention also discloses a preparation method of the bimetallic alloy ceramic film. The preparation method is implemented by a multi-target magnetron co-sputtering technology. The preparation technology is simple. The obtained bimetallic / ceramic film has strong characteristic of solar spectrum absorption in ultraviolet, visible light and near-infrared regions, has excellent thermal stability, and is applicable to the optical absorption field of metal nanoparticles at the temperature of being higher than 550 DEG C.

Description

technical field [0001] The invention belongs to the field of design and preparation of metal-ceramic thin film materials, and in particular relates to a bimetal / ceramic composite thin film and a preparation method thereof. Background technique [0002] Mix metal particles (W, Ni, Ag, Mo, Cr, etc.) into ceramics (Al 2 o 3 , AlN, SiO 2 、TiB 2 etc.) The parent phase can form a metal-ceramic composite material, which not only maintains the high hardness, high strength, wear resistance and oxidation resistance of ceramics, but also has the toughness and plasticity of metals, and has a wide range of uses. [0003] The Chinese patent with the publication number CN101126135A discloses a method for preparing a nano-cermet-based cermet. The cermet uses a conventional micron-submicron ceramic phase as a hardening strengthening phase, and a metal phase as a matrix and nano-ceramic particles as a strengthening phase. The nano-cermet material with high strength and high hardness is us...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35C23C14/06
CPCC23C14/06C23C14/081C23C14/10C23C14/185C23C14/352
Inventor 高俊华曹鸿涛王小雨
Owner NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI
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