A vacuum tube furnace system

Abstract

The invention discloses a vacuum tubular furnace system. The vacuum tubular furnace system comprises a working pipe, a corrugated pipe and a four-way pipe which are sequentially communicated, wherein one end of the working pipe is connected with an air intake pipeline through an air intake end joint, and the other end of the working pipe is connected with the corrugated pipe through an air exhaust end joint; a passage formed by the working pipe, the corrugated pipe and the four-way pipe is divided into two branches by the four-way pipe; the first branch is connected to a vacuum pump through a switch valve and a three-way pipe; and the second branch is connected to the vacuum pump through a buffering filter, a needle valve, an electromagnetic valve and a three-way pipe. The vacuum tubular furnace system further comprises a barometer used for measuring an air pressure in the passage, and a circuit automatic control system. Two air exhaust passages are adopted in the vacuum tubular furnace system disclosed by the invention, so that wide-range adjustment for an air exhaust capacity can be realized, and the air pressure can be accurately controlled in a wide range; in addition, the system realizes automatic control and adjustment for the air pressure by virtue of the electromagnetic valve and the buffering filter; and the vacuum tubular furnace system disclosed by the invention is good in air tightness, accurate in air pressure control, and capable of being used in an atmosphere rich in dust.

Description

technical field [0001] The invention relates to a vacuum tube furnace system, which belongs to the field of devices for material preparation and atmosphere heat treatment. Background technique [0002] Vacuum tube furnace systems are widely used in the fields of nanomaterial preparation, material atmosphere treatment and vacuum annealing. Vacuum tube furnace system is one of the most commonly used equipment for preparing nanomaterials by physical vapor deposition and chemical vapor deposition. A good vacuum tube furnace system requires features such as good sealing, precise adjustment, high stability, and easy replacement of working tubes. [0003] Existing technology mainly uses two different types of pumping channels, one with standard KF16 or KF25 diameter, which is usually used in high vacuum conditions, and the control accuracy is poor in low vacuum; the other is connected with plastic pipes, only A lower vacuum can be achieved. However, in practical applications, a w...

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Problems solved by technology

[0003] Existing technology mainly uses two different types of pumping channels, one with standard KF16 or KF25 diameter, which is usually used in high vacuum conditions, and the control accuracy is poor in low vacuum; the other is connected with plastic pipes, only Can achieve lower vacuum

However, in practical applications, a wide range of adjustments is often required. When the conditions vary greatly, only different pumping channels can be replaced, which brings inconvenience to experimental operations and differences in growth parameters.

The working tube interface of the prior art adopts customized parts, which has poor versatility, high cost, poor precision, and poor airtightness

In actual use, the air pressure is mainly controlled by the opening state of the manual adjustment valve, the accuracy and stability of the air pressure are poor, and repeated adjustments are required to maintain a specific air pressure

In addition, in an environment containing dust in the atmosphere, the dust is easy to block the pipeline, causing the narrow places such as the needle valve to be blocked, and even the needle valve needs to be disassembled for cleaning after 2-3 times of use. The tightness may also cause changes in specific instrument parameters, thereby affecting the accuracy of the device

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