Mold release film, method for manufacturing same, and method for manufacturing semiconductor package
A manufacturing method and release film technology, applied in semiconductor/solid-state device manufacturing, semiconductor devices, semiconductor/solid-state device components, etc., can solve problems such as easy electrification, semiconductor chip damage, etc. , Difficult to curl the effect of mold compliance
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no. 1 Embodiment approach
[0277] As an embodiment of the manufacturing method of a semiconductor package, it is directed to using the above-mentioned release film 1 as a release film and manufacturing it by compression molding. figure 2 The illustrated situation of the semiconductor package 110 is described in detail. The manufacturing method of the semiconductor package of this embodiment has the following process (α1)-(α7).
[0278] (α1) The release film 1 is arranged so that the release film 1 covers the cavity of the mold and the surface 2a of the release film 1 on the first thermoplastic resin layer 2 side faces the space in the cavity (the second thermoplastic resin layer 3 side The surface 3a faces the cavity surface) process.
[0279] (α2) A step of vacuum-adsorbing the release film 1 to the cavity surface side of the mold.
[0280] (α3) A step of filling the cavity with a curable resin.
[0281] (α4) Arranging the substrate 10 mounted with a plurality of semiconductor chips 12 at predeterm...
no. 2 Embodiment approach
[0321] As another embodiment of the manufacturing method of the semiconductor package, for using the above-mentioned release film 1 as the release film, it is manufactured by the transfer molding method. figure 2 The illustrated situation of the semiconductor package 110 is described in detail.
[0322] The manufacturing method of the semiconductor package of this embodiment has the following process (β1)-(β7).
[0323] (β1) The release film 1 is arranged so that the release film 1 covers the cavity of the mold and the surface 2a of the release film 1 on the first thermoplastic resin layer 2 side faces the space in the cavity (the second thermoplastic resin layer 3 side) The surface 3a faces the cavity surface) process.
[0324] (β2) A step of vacuum-adsorbing the release film 1 to the cavity surface side of the mold.
[0325] (β3) A step of disposing the substrate 10 on which the plurality of semiconductor chips 12 are mounted at predetermined positions in the cavity.
[...
no. 3 Embodiment approach
[0351] As another embodiment of the manufacturing method of the semiconductor package, for using the above-mentioned release film 1 as the release film, it is manufactured by the transfer molding method. image 3 The illustrated situation of the semiconductor package 120 is described in detail.
[0352] The manufacturing method of the semiconductor package of this embodiment has the following process (γ1)-(γ5).
[0353] (γ1) The release film 1 is arranged such that the release film 1 covers the cavity of the upper mold of a mold having an upper mold and a lower mold and the surface 2a of the release film 1 on the first thermoplastic resin layer 2 side faces the mold. The process of creating a space in the cavity (the surface 3a on the side of the second thermoplastic resin layer 3 faces the cavity surface of the upper mold).
[0354] (γ2) A step of vacuum-adsorbing the release film 1 to the cavity surface side of the upper mold.
[0355] (γ3) Arrange the substrate 70 on whic...
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