Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

A kind of rectangular ion trap with multilayer structure based on mems technology and its preparation method

A rectangular ion trap and multi-layer structure technology, which is applied in the direction of particle separation tubes, discharge tubes, electrical components, etc., can solve problems such as unfavorable control, and achieve the effect of firm bonding strength, good stability, and high integration

Active Publication Date: 2018-01-16
TSINGHUA UNIV
View PDF9 Cites 1 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this patent does not integrate the ion focusing electrode and the detection electrode. For a miniature ion trap, if an external ion focusing electrode is used, high assembly accuracy is required to ensure ion transmission efficiency, which is not conducive to control

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • A kind of rectangular ion trap with multilayer structure based on mems technology and its preparation method
  • A kind of rectangular ion trap with multilayer structure based on mems technology and its preparation method
  • A kind of rectangular ion trap with multilayer structure based on mems technology and its preparation method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0040] The rectangular ion trap with multi-layer structure based on MEMS technology and its preparation method provided by the present invention will be further described below with reference to the drawings and specific embodiments.

[0041] see figure 1 , figure 2 and image 3 , the multi-layer rectangular ion trap based on MEMS technology provided by the present invention comprises: an upper glass layer 1, a lower glass layer 5, an upper electrode layer 2 grown on the lower surface of the upper glass layer 1, and a lower electrode layer grown on the upper surface of the lower glass layer 5. An electrode layer 4, and a silicon layer 3 bonded between the lower surface of the upper glass layer 1 and the upper surface of the lower glass layer 5; wherein the upper electrode layer 2, the silicon layer 3 and the lower electrode layer 4 form an ion flow channel; the The ion flow channel along the ion flow Z direction is an ion focusing area 6 and an ion analysis area 7; the ion ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
electrical resistivityaaaaaaaaaa
electrical resistivityaaaaaaaaaa
thicknessaaaaaaaaaa
Login to View More

Abstract

A multi-layer structure rectangular ion trap based on MEMS technology and a preparation method thereof. The rectangular ion trap includes an upper glass layer, a lower glass layer, an upper electrode layer grown on the lower surface of the upper glass layer, and an upper electrode layer grown on the upper surface of the lower glass layer. The lower electrode layer, and the silicon layer bonded between the lower surface of the upper glass layer and the upper surface of the lower glass layer, form a multi-layer bonding structure of glass-metal-silicon-metal-glass, in which the upper electrode layer, silicon layer and the lower electrode layer form an ion flow channel; the ion flow channel is sequentially composed of an ion focusing area and an ion analysis area along the ion flow direction. The invention adopts MEMS technology, which has low energy consumption, high processing accuracy, high yield, high bonding strength, and good long-term stability. The rectangular ion trap has the advantages of small size and light weight; it has a wide range of applications in the field of micro-mass spectrometer analysis and detection. application prospects.

Description

technical field [0001] The invention relates to a rectangular ion trap mass analyzer with a multi-layer structure based on MEMS technology and a preparation method thereof, which belongs to the field of biochemical substance detection using ion trap mass spectrometers. Background technique [0002] Mass spectrometry is a universal chemical analysis method with high specificity and high sensitivity. It has been widely used in various fields such as life sciences, environmental monitoring, space exploration, medicine and health, and public safety. Among them, ion trap mass spectrometry has become an important branch of mass spectrometry instruments due to its relatively simple instrument structure and powerful time-tandem mass spectrometry capabilities. The core device of the ion trap mass spectrometer is the ion trap mass analyzer, which is mainly divided into two types: three-dimensional ion trap and two-dimensional ion trap. The stable state of the ion can be screened and ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): H01J49/42
CPCH01J49/0018H01J49/4225H01J49/4235
Inventor 唐飞霍新明王晓浩
Owner TSINGHUA UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com