Preparation method of micro nano composite textured structure black silicon and black silicon solar cells

Abstract

The invention relates to a preparation method of micro nano composite textured structure black silicon and black silicon solar cells. The preparation method of micro nano composite textured structure black silicon includes the following steps: performing atomization and corrosion on a silicon chip to obtain a silicon chip with a textured structure; and performing atomization and corrosion on the obtained silicon chip with the textured structure, so that a hole or line structure with a nanoscale is formed through corrosion in the textured structure and the black silicon with a micro nano composite textured structure can be obtained. The preparation method of micro nano composite textured structure black silicon and black silicon solar cells has the advantages of greatly reducing the corrosion cost, reducing the surface recombination, improving the photoelectric conversion efficiency, and being simple and controllable in operation, and can solve the problems that in a full liquid phase corrosion method, consumption of heavy metal is high; cleaning is not easy; and the nanometer light tripping structure is too deep.

Description

technical field [0001] The invention relates to the field of black silicon manufacturing, in particular to a method for preparing black silicon with micro-nano composite textured structure and black silicon solar cells. Background technique [0002] High efficiency and low cost have always been the goals pursued by the photovoltaic industry. For silicon-based solar cells, optical loss is one of the important obstacles hindering the improvement of solar cell efficiency. Black silicon is a new type of semiconductor optoelectronic material with a nano-light trapping structure. , has extremely low reflectivity to sunlight and wide-angle and wide-spectrum absorption characteristics, and has become an important material for research and preparation of high-efficiency crystalline silicon solar cells, and has important industrialization prospects. However, at present, there are many bottlenecks in the improvement of the efficiency of black silicon solar cells. From the perspective o...

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Problems solved by technology

[0006] In view of the above deficiencies in the current technology, the present invention provides a method for preparing black silicon and black silicon solar cells with a micro-nano composite textured structure. The method of the present invention greatly reduces corrosion costs, reduces surface recombination, and improves photoelectric conversion. Efficiency, and the operation is simple and controllable, and it solves the problems of high consumption of heavy metals, difficulty in cleaning, and too deep depth of the nano-light trapping structure in the full liquid phase corrosion method

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