Silicon-based liquid crystal chip and display device
A silicon-based liquid crystal and display device technology, applied in nonlinear optics, instruments, optics, etc., can solve problems such as poor matching between silicon-based liquid crystal chips and liquid crystal layers, improve yield and display effect, reduce side length, The effect of reducing the probability of poor matching of liquid crystal layers
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[0027] The liquid crystal-on-silicon chip in the prior art is likely to be poorly matched with the subsequent prepared liquid crystal layer. The shape of the pixel electrode 110 in the liquid crystal-on-silicon chip known to the inventor is generally square, such as figure 1 shown. The inventors have found through research that semiconductor processes such as wet etching will be used in the preparation of the pixel electrode 110, and these semiconductor processes will cause corrosion pits to be formed on the edge of the pixel electrode 110 (such as figure 2 Indicated by the dotted line area in the middle), the existence of corrosion pits will lead to poor matching of the subsequent liquid crystal layer.
[0028] The inventors have further studied and found that if the pixel electrode has the same area and the side length of the pixel electrode can be reduced, the probability of corrosion pits will be correspondingly reduced, thereby reducing the chance of poor matching of the...
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