Method for compounding high-quality low-oxygen low-iron aluminium nitride powder

Abstract

The invention relates to a method for compounding high-quality low-oxygen low-iron aluminium nitride powder, which comprises steps: aluminite powder, aluminium nitride and ammonium salt are uniformly mixed to obtain a mixture according to quality radio of (5-10): (10-40), the mixture is uniformly spread into an aluminium nitride ceramic saggar, then carbon power is uniformly spread on the surface layer of the mixture, the quality radio of the aluminite powder and the carbon powder is 60:1-180:1, a reactor is vacuumized to 1*10-4MPa through a vacuum pump, the aluminium nitride ceramic saggar which is filled with materials is put into a reactor cavity, nitrogen which is pretreated is pumped into the aluminium nitride ceramic saggar for 15-30 min in 5-8MPa, and fully diffuses to contact with the aluminite powder, is compounded in a self-propagating mode by being ignited to obtain a reactant, and the reactant is the high-quality low-oxygen low-iron aluminium nitride powder after being cooled. The method for compounding high-quality low-oxygen low-iron aluminium nitride powder breaks down reaction barriers to fully diffuse by adding the carbon power, vacuumizing the reactor in advance, treating nitrogen, pumping the nitrogen into the reactor in advance and keeping the nitrogen in high pressure for 15-30min, and is low in energy consumption, high in efficiency and obvious in oxygen removal effect.

Description

technical field [0001] The invention relates to a synthesis method of high-quality, low-oxygen and low-iron aluminum nitride powder, belonging to the field of chemical synthesis. Background technique [0002] Aluminum nitride ceramics have excellent properties such as high thermal conductivity, high bending strength, low dielectric constant, and low thermal expansion coefficient. It is a promising functional and structural material that can be used in the field of electronic packaging, and at the same time Suitable for high temperature and corrosive environments. The submicron-sized aluminum nitride powder can be used as an ideal material on the electronic package substrate when the Fe content is less than 35ppm and the O content is less than 1.2wt%. [0003] High-quality aluminum nitride powder is the key factor in determining these applications. It is difficult to synthesize aluminum nitride powder with high purity, low cost, low oxygen content, low iron content and stabl...

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Problems solved by technology

This method also has disadvantages: firstly, excess C must be de-Cized in dry air at 600-900°C after the reaction is complete; There is a relationship between type and performance, different types of raw materials, the difference in nitriding temperature can reach more than 200°C

[0019] The characteristics of this method are: the reaction time is short, AlN powder with good sintering activity can be obtained, and the purity is high, but it is limited by equipment and expensive

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