Multi-roll multi-chamber winding coating device

Abstract

The invention discloses a multi-roller and multi-chamber coiling film coating device. The device comprises a plurality of vacuum chambers which are independent from each other, wherein the plurality of vacuum chambers include an uncoiling chamber, a coiling chamber and at least one film coating chamber; the uncoiling chamber and the coiling chamber are correspondingly arranged at two sides of the film coating chamber; a vacuum lock is arranged between any two adjacent vacuum cambers; a plurality of water cooling drums which are correspondingly distributed on the top and at the bottom are arranged in the film coating chamber; at least two sputtering targets are distributed at one side of each water cooling drum; a target cover is arranged in the periphery of each sputtering target; a gap through which a coiled base material can pass is formed between the bottom part of each target cover and the surface of the corresponding water cooling drum; an independent sputtering chamber is formed in each target cover. According to the device, the film coating processes in adjacent film coating chambers are completely separated; the film coating chambers can be arranged according to the quantity of film layers and different types of the film layers; a multi-film composite film can be coated within one working cycle; in addition, the gas isolation of sputtering areas can be also achieved, thus the back flow of gas can be avoided, and as a result, the quality of a product can be improved.

Description

technical field [0001] The invention relates to the technical field of coil surface coating, in particular to a multi-roller and multi-chamber winding coating device. Background technique [0002] The flexible intelligent electrochromic film is a new type of electrochromic material, which has the ability to adjust light absorption and transmission under the action of an electric field, and can selectively absorb or reflect external thermal radiation and internal thermal diffusion, reducing summer maintenance. A lot of energy must be consumed to keep cool and warm in winter, and at the same time improve the natural light level and prevent privacy. At present, it is commonly used in color-changing applications such as smart windows, anti-glare rearview mirrors, dimming glass on high-end cars and airplanes, and is a product with a large market demand. [0003] For the processing of flexible intelligent electrochromic, photochromic, and thermochromic films, the traditional meth...

AI Technical Summary

Problems solved by technology

This makes it necessary to break the vacuum once every coating furnace, and the winding roller, unwinding roller and coating area are all in the atmosphere, so that the coating area will absorb water vapor and dust in the air and cause pollution. Therefore, it is difficult to obtain high-quality coatings

In addition, every furnace in the coating chamber needs to be evacuated again, the coating cycle is lengthened, and the production efficiency is low

At the same time, after the vacuum is broken, the reaction gas or protective gas needs to be refilled for each plating furnace, and the processing cost is high.

[0005] In the existing flexible circuit board coating equipment, the sputtering target is used to surround the water-cooled drum to coat the film layer. Each sputtering target is in the same vacuum environment, which is prone to diffraction contamination of the target material, and high-quality coatings cannot be obtained. film layer, especially when the surface of the winding substrate requires a variety of coating layers with different properties, this phenomenon is more obvious

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