Chemical complexing cleaning method for polycrystalline silicon equipment

A technology of polysilicon and equipment, applied in the direction of metal material coating process, etc., can solve problems such as inability to produce products, and achieve the effects of long running time, easy fine adjustment, and convenient operation

Active Publication Date: 2016-01-20
陕西庄臣环保科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the polysilicon production process, the cleanliness requirements for equipment are extremely strict, especially for oil molecules and heavy metal ions. The purity of solar-grade polysilicon requires 9% 9%, and the purity of electronic-grade polysilicon reaches 11% 9%. In a huge equipment system, even if A few PPM of oil molecules will cause serious consequences that the product cannot be produced

Method used

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  • Chemical complexing cleaning method for polycrystalline silicon equipment
  • Chemical complexing cleaning method for polycrystalline silicon equipment

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0052] Embodiment 1 is to the cleaning of pipeline, tubing class

[0053] 1) Pretreatment of carbon steel pipes before cleaning:

[0054] Severely corroded carbon steel pipes, welding slag, spatter, and paint must first be manually treated to achieve the degree of fine degreasing, and then visually inspected. Slightly corroded carbon steel pipes are directly degreased.

[0055] 2) Degreasing process:

[0056] 1. Crude degreasing process: the pipeline with serious oil pollution is firstly degreased, and the organic solvent trichlorethylene is used as the crude degreasing agent.

[0057] 2. Fine degreasing process: Clean with non-ionic surfactant, and dry with oil-free hot air after degreasing.

[0058] Rinse with water: Rinse with water immediately after degreasing, at room temperature for 30 minutes.

[0059] The nonionic surfactant is a solution of a mixture of fatty alcohol polyoxyethylene ether, chelating agent and dispersant, wherein the mass fraction of fatty alcohol ...

Embodiment 2

[0074] The cleaning of embodiment 2 tower class, tank class

[0075] 1. Formulation of process:

[0076] According to the equipment type, material, technical requirements, cleaning quality requirements, and the requirements of the construction party, the equipment cleaning plan is formulated. Equipment cleaning can be divided into two parts: spray cleaning and circulation cleaning. Large-volume equipment such as rectification towers and storage tanks (reaction tanks) are equipped with spray devices according to the degree of corrosion, and spray and circular cleaning are adopted, while other equipment are all circularly cleaned. Circular cleaning implements positive and negative cycle cleaning methods through the cleaning reversing platform to avoid missed cleaning in dead corners. For specific classification equipment connection installation cleaning processes, please refer to the classification cleaning process operating procedures and the attached table.

[0077] 2. Equip...

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Abstract

The invention provides a cleaning device for polycrystalline silicon storage tank equipment. A chemical complexing cleaning and equipment cleaning process is a new environment-friendly technical revolution of traditional acid and alkali cleaning. A complexing agent which is free of toxicity and smells, not volatile and free of pollution to the environment during emission is adopted for cleaning, various problems in polycrystalline silicon cleaning are completely solved, and corrosion damage of acid washing to equipment materials is avoided. Immersion type cyclic assembly line work can be adopted, the capacity of pipeline cleaning of the polycrystalline silicon equipment can be increased by 3-5 times, and the cleaning time of the polycrystalline silicon equipment can be greatly shortened.

Description

technical field [0001] The invention belongs to the technical field of polysilicon cleaning, and relates to a chemical complex cleaning method for polysilicon equipment. Background technique [0002] Polysilicon, the basic material used in the production of solar panels and electronic components, has seen its ups and downs in recent years. After years of development, the market for polysilicon products and components has gradually recovered steadily. In the polysilicon production process, the cleanliness requirements for equipment are extremely strict, especially for oil molecules and heavy metal ions. The purity of solar-grade polysilicon requires 9% 9%, and that of electronic grade reaches 11% 9%. In a huge equipment system, even A few PPM of oil molecules will cause serious consequences that the product cannot be produced. Therefore, the pre-startup cleaning technology of polysilicon equipment has represented the highest level in the industrial cleaning industry for man...

Claims

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Application Information

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IPC IPC(8): C23G1/08C23C22/62
Inventor 刘辉
Owner 陕西庄臣环保科技有限公司
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