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Branched poly (p-hydroxystyrene) copolymer used for 248nm photoresist

A technology of hydroxystyrene and acetoxystyrene, which is applied in the field of branched poly(p-hydroxystyrene) copolymer and its preparation, to achieve the effects of high light transmission, easy preparation and operation, and weak intermolecular entanglement

Inactive Publication Date: 2016-01-20
SUZHOU RUIHONG ELECTRONIC CHEM CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, there are few reports on the application of branched poly(p-hydroxystyrene) copolymers in 248nm photoresist

Method used

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  • Branched poly (p-hydroxystyrene) copolymer used for 248nm photoresist
  • Branched poly (p-hydroxystyrene) copolymer used for 248nm photoresist
  • Branched poly (p-hydroxystyrene) copolymer used for 248nm photoresist

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0030] (1) Synthesis of branched poly(4-acetoxystyrene copolymer): Into a 100ml three-necked round bottom flask equipped with a thermometer, reflux condenser and mechanical stirring, 11.259g (69.42mmol) of 4-acetoxybenzene was added in sequence Ethylene, (12.25mmol) 1.570g tert-butyl acrylate, (1.67mmol) 0.250g 4-vinylbenzyl mercaptan, (2.50mmol) 0.411g AIBN, and 31.476g of anhydrous methanol as polymerization solvent, and place the flask at a constant temperature In an oil bath, heat and stir to 40°C, and after blowing nitrogen for 10 minutes, the system is closed, the temperature is raised to 75°C, and the reaction is stirred at a constant temperature for 24 hours to obtain a branched poly(p-acetoxystyrene) copolymer. Its infrared, nuclear magnetic and ultraviolet spectra are respectively figure 2 , 3 , P1 in 4.

[0031] It can be seen from the infrared: 3000cm -1 Saturated and unsaturated C-H stretching vibration peaks on the left and right, 1770cm -1 Where is the C=O stretch...

Embodiment 2

[0035] (1) Synthesis of branched poly-4-acetoxystyrene copolymer: Into a 100ml three-necked round bottom flask equipped with a thermometer, reflux condenser, and mechanical stirring, 11.259g of 4-acetoxybenzene was sequentially added (68.00mmol) Ethylene, (12.00mmol) 1.570g tert-butyl acrylate, (3.33mmol) 0.250g 4-vinylbenzyl mercaptan, (2.50mmol) 0.411g AIBN, and 31.449g of anhydrous methanol as polymerization solvent, put the flask at a constant temperature In an oil bath, heat and stir to 40°C, and after blowing nitrogen for 10 minutes, the system is closed, the temperature is raised to 75°C, and the reaction is stirred at a constant temperature for 24 hours to obtain a branched poly(p-acetoxystyrene) copolymer.

[0036] (2) Deacetoxylation of branched poly4-acetoxystyrene copolymer: Change the reflux device in (1) to a distillation device, and raise the temperature to 80°C. Add 15g of anhydrous methanol and 1.255g of sodium methoxide to the reaction system of (1), keep the re...

Embodiment 3

[0038] (1) Synthesis of branched poly(4-acetoxystyrene copolymer): Into a 100ml three-necked round bottom flask equipped with a thermometer, reflux condenser and mechanical stirring, 11.259g (66.58mmol) of 4-acetoxybenzene was sequentially added Ethylene, (11.75mmol) 1.570g tert-butyl acrylate, (5.00mmol) 0.250g 4-vinylbenzyl mercaptan, (2.50mmol) 0.411g AIBN, and 31.423g of anhydrous methanol as polymerization solvent, and place the flask at a constant temperature In an oil bath, heat and stir to 40°C, and after blowing nitrogen for 10 minutes, the system is closed, the temperature is raised to 75°C, and the reaction is stirred at a constant temperature for 24 hours to obtain a branched poly(p-acetoxystyrene) copolymer.

[0039] (2) Deacetoxylation of branched poly4-acetoxystyrene copolymer: Change the reflux device in (1) to a distillation device, and raise the temperature to 80°C. Add 15g of anhydrous methanol and 1.228g of sodium methoxide to the reaction system of (1), keep ...

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Abstract

The invention discloses a branched poly (p-hydroxystyrene) copolymer used for 248nm photoresist, and a preparation method thereof. The preparation method comprises following steps: simple free radical polymerization is adopted, 4-acetoxystyrene and tert-butyl acrylate are taken as polymerization monomers, 4-vinyl benzyl mercaptane is taken as a chain transfer monomer, a branched poly (p-acetoxy styrene) copolymer is prepared via precipitation polymerization in absolute methanol; and the branched poly (p-hydroxystyrene) copolymer with protecting groups is obtained via partial deacetylation oxidation of the branched poly (p-acetoxy styrene) copolymer. The raw materials are widely available and cheap; operation of the polymerization process is simple; reactions are easy to control; polymer molecular weight can be controlled via adjusting reaction time and the content of the chain transfer monomer; the branched poly (p-hydroxystyrene) copolymer is high in photopermeability, excellent in heat resistance and etching resistance, and weak in inter molecule chain entanglement, so that it is possible to improve distinguishability performance of 248nm photoresist.

Description

Technical field [0001] The field of polymer materials to which the present invention belongs, in particular, relates to a branched poly(p-hydroxystyrene) copolymer for 248nm photoresist and a preparation method thereof. Background technique [0002] Poly(p-hydroxystyrene) (PHS) molecule contains a large number of benzene rings and hydroxyl groups that can form hydrogen bonds. It is widely used in solid-phase synthesis, phase transfer catalysis, high-performance liquid chromatography (HPLC) separation media, and epoxy resin Curing agents, organic adsorbents for waste liquids, selective permeation membranes, free radical traps and antioxidants. At the same time, because poly(p-hydroxystyrene) has excellent light transmittance at 248nm (optical density is 0.22μm -1 ), good alkali solubility, good heat resistance and excellent resistance to dry etching, making it gradually developed into the mainstream film-forming resin for 248nm photoresist. [0003] Compared with traditional linear...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C08F212/12C08F212/14C08F220/18G03F7/004
Inventor 刘敬成王宽刘仁刘晓亚李虎李治全穆启道郑祥飞纪昌炜
Owner SUZHOU RUIHONG ELECTRONIC CHEM CO LTD
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