Acoustic surface wave resonator having high Q value and one port applied to wireless temperature sensor

Abstract

The invention discloses an acoustic surface wave resonator having high Q value and one port applied to a wireless temperature sensor. The acoustic surface wave resonator comprises an interdigital transducer, two reflectors and a piezoelectric substrate, wherein the two reflectors are respectively distributed at two sides of the interdigital transducer; the interdigital transducer is arranged on the piezoelectric substrate in a manner of withdrawing and weighting a cosine function; and the two reflectors are arranged on the piezoelectric substrate in the form of a groove. The piezoelectric substrate is a quartz crystal, which is rotatably cut in 0-30-degree around a Y axis and transmitted along the X direction; the interdigital transducer is an aluminium electrode, the duty ratio of which is 1.3-1.5; the performances of small volume, high Q value, low loss, low parasitism and the like can be realized; the Q value is increased; loss of devices is reduced; and the acoustic surface wave resonator has high practicability.

Description

technical field [0001] The invention relates to a surface acoustic wave resonator, in particular to a high-Q surface acoustic wave single-ended pair resonator applied to a wireless temperature sensor, and belongs to the technical field of semiconductor plane production. Background technique [0002] Surface-acoustic-wave resonator (surface-acoustic-wave), the main working principle of SAW surface acoustic wave components is to use the piezoelectric properties of piezoelectric materials, and use the input and output transducers (Transducer) to convert the input signal of the electric wave into mechanical energy. After processing, the mechanical energy is converted into electrical signals to achieve the goal of filtering unnecessary signals and noise and improving the quality of receiving signals; it is widely used in various wireless communication systems, televisions, video recorders and global satellites on the positioning system receiver. [0003] Its main function is t...

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Problems solved by technology

[0006] In order to solve some problems existing in the performance of single-ended surface acoustic wave resonators used in wireless temperature sensors, in order to achieve small volume, high Q value, low loss and low parasitic performance, the purpose of the present invention is to provide a A single-ended acoustic surface applied to a wireless temperature sensor that performs cosine function cutting finger weighting on an interdigital transducer, adopts a groove structure reflector, and adopts a quartz substrate that is cut around the Y axis at 0° to 35° and propagates along the X direction wave resonator

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