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Neutral buoyancy type MEMS vector hydrophone

A vector hydrophone and buoyancy technology, which is applied in the direction of vibration measurement, instrumentation, and vibration measurement in fluids, can solve the problems of large frequency response fluctuations and low sensitivity, and achieve the effect of simple method and easy realization

Inactive Publication Date: 2015-11-18
ZHONGBEI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide a neutral buoyancy MEMS vector hydrophone to solve the problems of low sensitivity and large frequency response fluctuations of existing hydrophones

Method used

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  • Neutral buoyancy type MEMS vector hydrophone
  • Neutral buoyancy type MEMS vector hydrophone
  • Neutral buoyancy type MEMS vector hydrophone

Examples

Experimental program
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Embodiment Construction

[0046] The present invention will be further described below in conjunction with accompanying drawing:

[0047] Such as Figure 1 to Figure 4 As shown, a neutral buoyancy nano-electromechanical vector hydrophone includes a stainless steel circuit case 2 with a built-in signal processing circuit board 1, and the top of the stainless steel circuit case 2 is extended with a necked case 4 and a bottom with a built-in wire 3. The nozzle is plugged with a plug 6 connecting the cable 5, and the wire 3 in the necking tube shell 4 is connected to the input end of the signal processing circuit board 1 in the stainless steel circuit shell 2, and the output end of the signal processing circuit board 1 is passed through The wire 3 is connected to the cable 5 on the plug 6; the top of the necking tube shell 4 is fixedly connected with a fixed disc 7 with a central through hole, and the fixed disc 7 is provided with an installation groove 8, and the polyurethane non-woven fabric is passed th...

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Abstract

The invention provides a neutral buoyancy type MEMS vector hydrophone, wherein the detection ability of a NEMS vector hydrophone for weak acoustical signals in the water is significantly improved. The neutral buoyancy type MEMS vector hydrophone comprises a stainless steel circuit shell, a necked shell, a fixed disc, and an insulated annular tray with a boss. The boss is provided thereon with a circular PCB board and a detection chip. The detection chip comprises a four-beam micro-structure, a sensitive cylinder body and a buoyancy ball. The insulated annular tray is provided with a sealed screw hole and a signal screw hole. A sound transmission cap arranged on the insulated annular tray and internally filled with the silicon oil is fixedly connected with the insulated annular tray. The sound transmission cap is made of latex and super elastic materials. A support frame is arranged in the sound transmission cap. According to the technical scheme of the neutral buoyancy type MEMS vector hydrophone, the sensitivity of the NEMS vector hydrophone and the depths of directive pits are greatly increased on the premise that the frequency band of the hydrophone is not influenced at all. Therefore, a good prospect is provided for the application and development of hydrophones.

Description

technical field [0001] The invention relates to a vector hydrophone in the field of MEMS sensors, in particular to a high-sensitivity neutral buoyancy nano-electromechanical vector hydrophone. Background technique [0002] With the continuous development of underwater acoustic technology, the vector hydrophone has become an inevitable choice to obtain spatial gain in low frequency and small angle changes, and to accurately give the azimuth information of underwater targets. Due to the complexity of the underwater sound detection environment, the application effect of the MEMS vector hydrophone is closely related to many factors, among which the high sensitivity performance has an important influence on its application effect. [0003] At present, the technology of MEMS hydrophones has become mature, but the existing microstructures have insufficient ability to pick up underwater acoustic signals, resulting in low sensitivity of the microstructures, and the coupling effect of...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01H3/00
Inventor 张国军韩建军刘源刘梦然白冰徐伟郭静王丽娟王续博郭楠曾瑞薛晨阳张文栋
Owner ZHONGBEI UNIV
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