Preparation method of pyrolytic carbon coating
A technology of pyrolytic carbon and coating, which is applied in the direction of coating, metal material coating process, gaseous chemical plating, etc., can solve the problems of uneven pyrolytic carbon coating, achieve simple preparation method and avoid vacuuming operation , the effect of uniform thickness
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Examples
preparation example Construction
[0015] A method for preparing a pyrolytic carbon coating, comprising the steps of: (1) providing a chemical vapor deposition furnace with a furnace body, wherein a corundum tube is provided throughout the furnace body, and a circular tube is arranged on the inlet end of the corundum tube. Holes for tungsten rod insertion, the other end of the tungsten rod is connected to the graphite column, and the graphite column faces the gas outlet end of the corundum tube for pasting the graphite substrate; (2) immerse the graphite substrate in the precursor solution, where the precursor solution is SR249 and xylene It is configured according to the volume ratio of (0.3-1.0): 1; (3) Take out the graphite matrix after immersing it for 24 hours, and place it in the middle of the corundum tube; (4) Introduce argon gas into the corundum tube, and Raise the temperature of the furnace body to 1100-1250°C; (5) continue to feed argon and methane, and set the mass ratio of methane and argon to (800...
Embodiment 1
[0023] Immerse the graphite substrate in the precursor solution, where the precursor solution is made of SR249 and xylene at a volume ratio of 0.3:1; take out the graphite substrate after soaking it for 24 hours, stick it on the bottom surface of the graphite column with high temperature adhesive, and Put it into the corundum tube, keep the graphite substrate suspended in the middle of the corundum tube. Introduce argon, the gas flowmeter cleans the argon pipeline for 8 minutes, then control the argon flow rate to 160ml / min through the flowmeter, and raise the temperature to 1100℃ at a rate of 9℃ / min; The mass ratio of the gas is 800:275; stop feeding methane after 50 minutes, control the argon flow rate to 160ml / min, and cool to room temperature with the furnace; the permeability coefficient obtained on the graphite substrate is 1.77*10 -8 cm 2 / (s.cmHg) of pyrolytic carbon coating.
Embodiment 2
[0025] Immerse the graphite substrate in the precursor solution, where the precursor solution is SR249 and xylene with a volume ratio of 0.5:1; take out the graphite substrate after soaking it for 24 hours, and stick it on the bottom surface of the graphite column with high temperature glue, and put it together Put it into the corundum tube, keep the graphite substrate suspended in the middle of the corundum tube. Introduce argon, and the gas flowmeter cleans the argon pipeline for 10 minutes, then controls the argon flow rate to 170ml / min through the flowmeter, and raises the temperature to 1150℃ at a rate of 9.5℃ / min; The mass ratio of the gas is 900:300; stop feeding methane after 80 minutes, control the argon flow rate to 170ml / min, and cool to room temperature with the furnace; the permeability coefficient obtained on the graphite substrate is 8.48*10 -9 cm 2 / (s.cmHg) of pyrolytic carbon coating.
PUM
Property | Measurement | Unit |
---|---|---|
osmotic coefficient | aaaaa | aaaaa |
osmotic coefficient | aaaaa | aaaaa |
osmotic coefficient | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com