Microwave frequency measurement chip as well as applying method and preparing method thereof
A microwave frequency measurement and chip technology, applied in frequency measurement devices and other directions, can solve the problems of large measurement error, high price, poor stability, etc.
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[0018] In order to make the objectives, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the implementation examples. It should be understood that the specific embodiments described herein are only used to explain the present invention, but not to limit the present invention.
[0019] see figure 1 , the microwave frequency measurement chip of the present invention is based on silicon-based optoelectronic technology, including a grating coupler 5 , a phase modulator 8 , a filter based on a micro-ring resonant cavity 7 , and a bus waveguide 9 . The bus waveguide 9 is used to achieve signal transmission between the grating coupler 5 , the phase modulator 8 and the filter.
[0020] The grating coupler 5 is used for receiving the optical signal and outputting the optical carrier signal. The optical carrier signal is transmitted in the bus waveguide 9 , first through the phase mod...
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