how to make thz antenna array

Abstract

The utility model discloses a manufacturing method of a THz antenna array. The method includes the following steps: 1) selecting a substrate; 2) sequentially growing materials of a buffer layer, a passive waveguide layer, an optical coupling layer, a refractive index matching layer, a light absorption layer, a cladding layer and a contact layer on the substrate; 3) sequentially etching the materials of the the contact layer, cladding layer, the light absorption layer, and the refractive index matching layer to the optical coupling layer, wherein the shape formed by the etching is a quadrilateral structure which is a photomixer waveguide; 4) manufacturing an electrode on the contact layer on the photomixer waveguide and manufacturing electrodes on the optical coupling layer at the two sides of the photomixer waveguide; 5) etching the optical coupling layer to a depth of reaching the passive waveguide layer so that a wedge optical coupling waveguide is formed; 6)etching the passive waveguide layer to the buffer layer so that a 1*N optical splitter, an input waveguide and a passive waveguide are formed and thus a substrate is formed; 7) manufacturing THz antennae on the substrate and finishing the preparation. The manufacturing method is capable of obtaining a high-performance THz antenna array device.

Description

technical field [0001] The invention relates to the field of optoelectronic devices, in particular to a method for manufacturing a THz antenna array. Background technique [0002] The frequency is 0.1-10THz (1THz=10 12 Hz) range are called terahertz (THz) waves. Due to its special position in the electromagnetic spectrum, THz waves are widely used in basic research fields such as physics, chemistry, astronomy, life science and medical science, as well as in security inspection, medical imaging, environmental monitoring, food inspection, radio astronomy, wireless communication and weapon guidance. And other applied research fields have great scientific research value and broad application prospects. The generation of THz waves is the key to the development and application of THz science and technology. Among the many types of THz sources, the THz source based on semiconductor optical mixing devices has the advantages of low cost, compact structure, and room temperature ope...

AI Technical Summary

Problems solved by technology

The uneven power distribution of the star coupler and the difficulty in aligning the optical fiber with the UTC-PD prevent the advantages of the array antenna from being fully utilized

In the above-mentioned THz array radiation source based on GaAs photoconductive switch, the microlens array is used to focus the excitation light transmitted in free space to the array unit, because it is difficult to align the lens focus with the array unit and there are errors in the microlens parameters , the radiation intensity received by the array unit is also very uneven, which seriously limits the improvement of the array performance

[0011] It can be seen that the surface incidence mode of the unit frequency mixing device makes it difficult for the pump light to be evenly distributed and efficiently utilized, which is the main reason for the poor performance of the monolithically integrated THz array radiation source

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