Planar optical waveguide heating device based on two-dimensional carbon material and its preparation method

Abstract

The invention discloses a two-dimensional carbon material based planar optical waveguide heating device and a preparation method thereof. The two-dimensional carbon material based planar optical waveguide heating device comprises a two-dimensional carbon material transparent thermal resistor covering a planar optical waveguide and two contact points which connect an exterior power source; the planar waveguide is formed by a substrate and an isolating layer, a core layer and the two-dimensional carbon material transparent thermal resistor which are sequentially deposited on the substrate from top to bottom; the two-dimensional carbon material transparent thermal resistor which covers one side of the upper surface of the core layer of the planar optical waveguide is directly in contact with the core layer; the two contact points are connected at two ends of the two-dimensional carbon material transparent thermal resistor through connecting leads. The two-dimensional carbon material based planar optical waveguide heating device has the advantages of being high in heating efficiency, achieving high heating temperature and being rapid in heating speed, compatible to silicon photonic device preparation process and applicable to a small-sized planar optical wave thermal conduction optical devices.

Description

technical field [0001] The invention relates to a waveguide heating device and a preparation method thereof, in particular to a planar optical waveguide heating device based on two-dimensional carbon materials and a preparation method thereof in the field of planar optical waveguide integrated devices. Background technique [0002] Utilizing the thermo-optic effect is an important means to realize tunable optical devices, such as thermo-optic switches, thermo-optic modulators, tunable optical attenuators, tunable power splitters, and thermo-optic tunable filters. To realize thermo-optic devices, the heating device is very important. Current heating devices consist of a planar optical waveguide, a metal resistance wire, and two contact points for an external power source. The cross-section of the planar waveguide is as figure 1 As shown, it consists of a substrate 6 , an isolation layer 7 , a core layer 8 , an upper cladding layer 9 and a metal resistance wire deposited seq...

AI Technical Summary

Problems solved by technology

However, due to factors such as the highest current density, the allowable maximum temperature of the metal thermal resistance is limited.

Therefore, the maximum tuning range of thermo-optic devices employing such heating devices is limited

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