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Preparation method of titanium dioxide superhydrophobic film

A titanium dioxide and super-hydrophobic technology, applied in the direction of titanium dioxide, titanium oxide/hydroxide, etc., can solve the problems of synchronous construction of thin films, long preparation cycle, complex process, etc., and achieve excellent hydrophobicity, regular rough structure and repeatability Good results

Active Publication Date: 2014-12-03
YANGZHOU GUANGTAI CHEM FIBER
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Light and plasma etching techniques can prepare regular micro-patterned micron-scale rough structures on the surface of silicon dioxide and titanium dioxide films, and then chemically modify them to prepare super-hydrophobic surfaces, but this method must first prepare oxidation It does not have the characteristics of thin film preparation and rough surface simultaneous construction, and the preparation cycle is long and the process is complicated.

Method used

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  • Preparation method of titanium dioxide superhydrophobic film
  • Preparation method of titanium dioxide superhydrophobic film
  • Preparation method of titanium dioxide superhydrophobic film

Examples

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preparation example Construction

[0031] A kind of preparation method of titanium dioxide superhydrophobic film of the present invention, specifically comprises the following steps:

[0032] Step 1: Preparation of titanium dioxide photosensitive sol

[0033] Add phenylacetone to methanol to dissolve, then add a certain amount of butyl titanate, the mass ratio of butyl titanate: phenylacetone: methanol is 1:0.5~1:10~20, seal and stir at room temperature for 2~ 5h, get TiO 2 Photosensitive sol; the viscosity of the sol can be adjusted by adding polyethylene glycol 200 (PEG-200), and the mass fraction of polyethylene glycol 200 is TiO 2 0.1% to 0.8% of the total weight of photosensitive sol;

[0034] Step 2: Preparation of titanium dioxide xerogel film

[0035] Immerse the cleaned silicon wafer in the titanium dioxide photosensitive sol obtained in step 1, and draw a smooth and flat sol-gel film on the silicon wafer by dipping and pulling method, the pulling speed is 0.005-0.025cm / s, and then dry , the drying...

Embodiment 1

[0043] Step 1: Preparation of titanium dioxide photosensitive sol

[0044] In a closed glove box where the relative humidity is not more than 40% RH and normal temperature and pressure, phenylacetone is added to dissolve in methanol, and then a certain amount of butyl titanate is added, the amount of butyl titanate: phenylacetone: methanol The ratio is 1:0.5:10. After sealing, stir at room temperature on a magnetic stirrer for 2 hours to obtain light yellow TiO 2 Transparent photosensitive sol;

[0045] Step 2: Preparation of titanium dioxide xerogel film

[0046] Dip the cleaned silicon wafer into the titanium dioxide photosensitive sol obtained in step 1, and draw a smooth and flat sol-gel film on the silicon wafer at a pulling speed of 0.005 cm / s by dipping and pulling method, and then at a temperature of 80°C Drying for 10min at low temperature to obtain a titanium dioxide xerogel film;

[0047] Step 3: Preparation of titanium dioxide film with regular micron-scale lattic...

Embodiment 2

[0053] Step 1: Preparation of titanium dioxide photosensitive sol

[0054] In a closed glove box where the relative humidity is not more than 40% RH and normal temperature and pressure, phenylacetone is added to dissolve in methanol, and then a certain amount of butyl titanate is added, the amount of butyl titanate: phenylacetone: methanol The ratio is 1:0.75:15. After sealing, stir at room temperature on a magnetic stirrer for 3.5h, then add PEG-200 with a total weight of 0.45% of the sol, and continue stirring for 0.5h to obtain light yellow TiO 2 Transparent photosensitive sol;

[0055] Step 2: Preparation of titanium dioxide xerogel film

[0056] Immerse the cleaned silicon wafer in the titanium dioxide photosensitive sol obtained in step 1, and draw a smooth and flat sol-gel film on the silicon wafer at a pulling speed of 0.015 cm / s by dipping and pulling method, and then at a temperature of 90°C Drying for 7.5min at a lower temperature to obtain a titanium dioxide xero...

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Abstract

The invention discloses a preparation method of a titanium dioxide superhydrophobic film, which comprises the following steps: constructing a micron-sized dot matrix coarse structure on a titanium dioxide film surface by a photosensitive sol-gel micro-machining technique, and carrying out chemical modification on the titanium dioxide film surface subjected to micro-pattern coarsening by using 1H,1H,2H,2H-perfluorooctyl trichlorosilane to obtain the superhydrophobic titanium dioxide film. By regulating the sol proportioning and dual-beam laser interference fringe width, the size of the micron-sized dot matrix coarse structure on the titanium dioxide film surface can be effectively regulated, thereby preparing the titanium dioxide films with different hydrophobicities. The prepared film surface coarse structure has the advantages of high regularity, excellent hydrophobicity, simple technique and favorable repetitiveness, and is easy to regulate.

Description

technical field [0001] The invention belongs to the technical field of film preparation methods, and in particular relates to a preparation method of titanium dioxide superhydrophobic film. Background technique [0002] The wettability of the material surface is an important property of the material. Many physical and chemical processes, such as adhesion, adsorption, dispersion, etc., are closely related to the wettability of the material surface. Superhydrophobic surface means that the contact angle between the material surface and water is greater than 150°, and the rolling angle is less than 10°. The non-wetting and self-cleaning properties of the superhydrophobic surface make it widely used in the fields of self-cleaning, waterproof, anti-icing, anti-corrosion, anti-adhesion of MEMS devices, etc., and has attracted extensive attention. [0003] The preparation of superhydrophobic coatings needs to meet two basic conditions: (1) the surface of the material has a microsco...

Claims

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Application Information

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IPC IPC(8): C01G23/047C04B41/50
Inventor 段宗范赵振赵高扬赵麦群
Owner YANGZHOU GUANGTAI CHEM FIBER
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