Manufacturing method for quartz comb teeth capacitive accelerometer

Abstract

The invention relates to a manufacturing method for a quartz comb teeth capacitive accelerometer. The accelerometer comprises an upper cover plate, a lower cover plate and sensitive components. The manufacturing method refers to manufacturing of the sensitive components, manufacturing of the upper cover plate and the lower cover plate and bonding between the upper cover plate and the lower cover plate. According to the method, quartz materials are adopted in manufacturing of the teeth capacitive accelerometer for the first time, the manufacturing method aiming at the specific structure of the accelerometer is innovatively designed, and new purposes of the quartz materials are achieved. The whole structure of the capacitive accelerometer is made of the quartz materials, thermal expansion coefficient is matched with the accelerometer, temperature performance of sensors can be improved, great sensing masses and initial capacitance values can be obtained, sensitivity and resolution of the sensors can be obviously improved, and it is ensured that manufactured comb teeth have large depth-to-width ratios.

Description

technical field [0001] The invention relates to a preparation method of a quartz comb capacitive accelerometer, which belongs to the technical fields of sensing technology and micro-electronic machinery (MEMS). Background technique [0002] Micromachined accelerometer is a kind of mechanical quantity sensor made based on microelectromechanical system (MEMS) processing technology, which can be used to measure inertial parameters such as inertial force, tilt angle, vibration and impact. Micromechanical accelerometers have the advantages of small size, low power consumption, low cost, high reliability, and easy mass production. They have been widely used in many fields such as transportation, industrial control, inertial navigation, medicine, instrument testing, and military affairs. . Among all kinds of micro-mechanical acceleration sensors, the comb-tooth capacitive accelerometer is widely used because it can increase the detection capacitance and the damping coefficient is ...

AI Technical Summary

Problems solved by technology

[0003] Usually comb-tooth capacitive accelerometers use silicon as the structural material, and the bulk micromachining of high aspect ratio silicon structures usually requires etching equipment such as RIE or ICP, which is costly, and silicon is a semiconductor material, and its electrical properties are difficult. Affected by various environmental factors such as temperature and radiation

Quartz crystal is a highly stable insulating material, which has been widely used in communication, GPS, sensors and other fields for many years. Sensitive capacitance, the range of the sensor is very small

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