TFT, TFT array substrate and manufacturing method thereof, display panel and display apparatus

Abstract

The invention describes a TFT, a TFT array substrate and a manufacturing method thereof, a display panel and a display apparatus. The TFT comprises a gate electrode, a gate electrode insulating layer arranged on the gate electrode, a semiconductor active layer arranged on the gate electrode insulating layer, an etching barrier layer arranged on the semiconductor active layer, and a source electrode and a drain electrode both arranged on the semiconductor active layer. Both the source electrode and the drain electrode do not cover the edges of the semiconductor active layer. When formed, the source electrode and the drain electrode are not connected with the semiconductor active layer; then an insulating film is used to pave the edges of the semiconductor active layer; and then the source electrode and the drain electrode are connected to the semiconductor active layer by means of a transparent conductive layer. Therefore, the discharge breakdown risk of metal of the source electrode and the drain electrode to the gate electrode caused by over-etching of the etching resisting layer is avoided. Besides, one more insulating film between the source and the drain electrodes and gate lines reduces the parasitic capacitance.

Description

technical field [0001] The present invention relates to the display field, in particular to a TFT, a TFT array substrate and a manufacturing method thereof, a display panel and a display device including the TFT array substrate. Background technique [0002] The flat panel display is currently the mainstream display, and is widely used in electronic products such as computer screens, mobile phones, personal digital assistants, and flat-screen TVs because of its thin and light appearance, power saving, and no radiation. [0003] In the prior art, flat panel displays are divided into active matrix displays and passive matrix displays in terms of driving methods. The difference between an active-matrix display and a passive-matrix display is that an active-matrix display is provided with active elements, and generally, the active elements are thin-film transistors. Active-matrix displays use thin-film transistors to control the operation of each pixel. [0004] In the process...

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Problems solved by technology

[0004] In the process of fabricating thin film transistors on the substrate in the prior art, since the semiconductor active layer is easily damaged, an etch barrier layer is formed above the semiconductor active layer to protect the semiconductor active layer. When the barrier layer is etched, the gate insulating layer will be over-etched at the edge of the semiconductor active layer.

As a result, the risk of discharge breakdown between the source and drain metals and the gate metal increases, and because there is only one gate insulating layer between the source and drain metals and the gate metal, there is a large parasitic capacitance

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