Femtosecond laser proton direct-writing system

Abstract

The invention provides a femtosecond laser proton direct-writing system used for solving problems of present direct-writing systems such as low writing resolution ratio, unstable power control, large noise, profile depth error and limit in thickness requirements of an anti-corrosion agent. The femtosecond laser proton direct-writing system comprises a master controller, a proton beam generation system used for generating a proton beam of MeV energy level according to control of the master controller, a writing device used for writing a three-dimensional embossment structure on the surface of an anti-corrosion material workpiece by the utilization of the proton beam of MeV energy level, a follow-up platform used for placing the anti-corrosion material workpiece and moving to realize horizontal and vertical writing, and a follow-up platform control system used for controlling movement of the follow-up platform according control of the master controller and being connected with the master controller and the follow-up platform. By the above femtosecond laser proton direct-writing system, a three-dimensional embossment structure which has advantages of high aspect ratio, vertical and smooth side wall, low line edge roughness, high density and high precision is written by the utilization of the high energy proton beam.

Description

technical field [0001] The invention relates to the technical field of writing systems, in particular to a femtosecond laser proton direct writing system. Background technique [0002] Proton beam writing (PBW) is a new ion beam technology that has developed rapidly in recent years. Existing technical solutions similar to proton beam writing include laser direct writing technology and electron beam writing (EBW). [0003] First, a brief introduction to laser direct writing technology and electron beam writing (EBW) technology is as follows: [0004] 1. The laser direct writing technology uses a laser beam with variable intensity to expose the resist material coated on the surface of the substrate to a variable dose, and forms the required relief profile on the surface of the resist layer after development. The basic working principle of the laser direct writing system is that the computer controls the high-precision laser beam scanning to directly implement variable dose e...

AI Technical Summary

Problems solved by technology

[0010] The invention provides a femtosecond laser proton direct writing system, which is used to solve the problems of the existing direct writing system, such as low writing resolution, unstable power control, large noise, errors in the contour depth and limited requirements on the thickness of the resist. limit problem

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