Forming method of multigraph
A technology of multiple graphics and graphics, which is applied in the fields of electrical components, semiconductor/solid-state device manufacturing, circuits, etc., can solve the problems of complex process and high cost of small-sized multiple graphics, and achieve uniform width and spacing, uniform spacing, and film shape retention Good results
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[0039] It can be seen from the background art that the process of forming small-sized multiple patterns in the prior art is complicated and costly.
[0040] The inventors of the present invention have studied the formation methods of multiple patterns in the prior art, and found that the prior art mostly uses sidewall technology to obtain small-sized patterns, and multiple hard mask transfers are required to obtain multiple patterns. First form the first sidewall around the hard mask layer, transfer the first sidewall pattern to the sacrificial layer to form a sacrificial pattern, then form the second sidewall around the sacrificial pattern, and transfer the second sidewall to the material layer to be etched . Since the second sidewall is formed after the first sidewall is transferred to the sacrificial layer, multiple transfers of the hard mask are caused and the process is complicated.
[0041] Based on the above studies, the inventors of the present invention proposed a me...
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