Base plate drying device and method

A drying device and substrate technology, applied in the direction of drying gas arrangement, progressive dryer, drying solid materials, etc., can solve problems such as missing, substrate defects, and lower product yield

Inactive Publication Date: 2014-08-20
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Using the air knife to dry the substrate, on the one hand, can achieve the drying of the substrate, but on the other hand, the high-pressure air ejected by the air knife is easy to cause the photoresist on the surface of the glass substrate to fall off or partially missing, resulting in There are defects that reduce product yield

Method used

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Embodiment 1

[0032] Embodiment 1 of the present invention provides a substrate 4 drying device, the structure diagram is as follows figure 1 As shown, it includes a cavity 7 and a drying rod and an inductor 1 arranged on the top of the cavity 7 , the cavity 7 is filled with a liquid for immersing the substrate 4 .

[0033] The drying bar dries the substrate 4 leaving the liquid, including a first drying bar 21 and a second drying bar 22 arranged in parallel, with a gap between the first drying bar 21 and the second drying bar 22, and one or both ends of the gap are arranged There is a sensor 1 for monitoring the position of the substrate 4 away from the liquid.

[0034] The substrate drying device improves the structure of the existing substrate drying device, no longer uses the air knife to directly dry the substrate surface, and monitors the position where the substrate leaves the liquid through the sensor. The gas ejected from the drying rod on the side dries the substrate to avoid def...

Embodiment 2

[0046] Based on the above, Embodiment 2 of the present invention also provides a method for drying a substrate based on the substrate drying device described in Embodiment 1, which specifically includes:

[0047] The substrate gradually leaves the liquid under the thrust force. When the sensor senses that the substrate leaves the liquid, the first drying rod and the second drying rod located on both sides of the substrate spray gas to the surface of the substrate. At the same time, the substrate continues to leave the liquid under the thrust. Under the action of gas, the Marangoni effect is used to change the surface tension of the liquid film on the substrate, and the surface tension gradient of the liquid film shrinks the liquid film to realize the drying of the substrate surface.

[0048] Further, when the sensor senses that the substrate is completely separated from the liquid, the ejection of gas is stopped.

[0049] Based on the above, the schematic diagram of the drying...

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Abstract

The invention discloses a base plate drying device and method. The base plate drying device comprises a cavity, a drying rod and sensors. The drying rod and the sensor are arranged at the top of the cavity. Liquid in which a base plate is immersed is arranged in the cavity. The drying rod dries the base plate which is separated from the liquid and comprises a first drying rod and a second drying rod which are arranged in parallel. A gap is formed between the first drying rod and the second drying rod. The sensors are arranged at one end or the two ends of the gap and are used for monitoring the position of the base plate which is separated from the liquid. According to the device, gas is sprayed to the surface of the base plate which is separated from the liquid through the drying rod, the surface tension gradient formed by changing of liquid film surface tension through the Marangoni effect is used for contracting a liquid film, drying is carried out on the surface of the base plate, base plate surface defects cannot be caused, and base plate yield is improved.

Description

technical field [0001] The invention relates to the technical field of liquid crystal display, in particular to a substrate drying device and a substrate drying method. Background technique [0002] At present, in the manufacturing process of the substrate in the field of liquid crystal display device processing, generally, a circuit pattern or a color filter (color filter, CF for short) is formed on a glass substrate first to obtain an array substrate and a color filter substrate. The liquid crystal is dripped on the color filter substrate, and the display panel is obtained by aligning the two. Generally, before making circuit patterns and color filters on the glass substrate, it is necessary to perform chemical treatment such as developing or etching on the glass substrate. [0003] Before or after the substrate is treated with the chemical solution, the substrate must be cleaned with a cleaning solution such as pure water. In order to carry out the subsequent process nor...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F26B5/00F26B21/14
CPCF26B5/14F26B21/004F26B21/14F26B5/00F26B15/20
Inventor 张小祥郭总杰刘正王守坤刘明悬
Owner BOE TECH GRP CO LTD
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