Flexible pressure sensor based on dielectric high-elastic polymer, and method for sensing pressure

Abstract

The invention discloses a flexible pressure sensor based on a dielectric high-elastic polymer, and a method for sensing pressure. The sensor comprises a high-elastic polymer film interlayer, a flexible electret positive electrode and a flexible electret negative electrode which are respectively bonded to the upper surface and the lower surface of the high-elastic polymer film interlayer, and a conductive trace which is respectively clamped to the flexible electret positive electrode, the flexible electret negative electrode and the high-elastic polymer film interlayer and is led out through the edge of the side surface of the high-elastic polymer film interlayer. An upper insulation support ring and a lower insulation support ring fix a sandwich structure composed of multiple film layers in the middle. In the method for sensing the pressure, a polarized electric field is provided by using a flexible electret electrode respectively provided with a certain quantity of positive charge and negative charge, the dielectric elastic polymer film generates curved surface deformation under an external pressure effect, capacitance changes accordingly, and the size of external pressure can be obtained through measuring the voltages of the positive electrode and the negative electrode. By using the sensor and the method provided by the invention, the thickness direction dimension restrictions brought by a conventional capacitive sensor air dielectric layer are eliminated, the sensor can be adaptive to different working conditions by adjusting material combination of the electret electrodes and the dielectric elastic polymer film, the sensor can work in a severe environment with high temperature and high moisture, the energy loss is small, the integration is high, and the preparation cost is low.

Description

technical field [0001] The invention belongs to the technical field of sensors, and in particular relates to a flexible pressure sensor based on a dielectric high elastic polymer and a method for sensing pressure. Background technique [0002] As the main way and means of obtaining information, sensor technology is widely used in many fields of government, national economy and national defense construction. As an original component that receives the pressure of the external gas through a thin film and converts it into an electrical signal, the pressure sensor plays an important role in the measurement of transient pressure in many engineering fields, such as the real-time pressure field in the cylinder of the internal combustion engine, the parking machine Liquid pressure, gas-hydraulic pressure of gas-liquid re-entry machine, pressure test of air extraction device, etc. According to different working principles, pressure sensors can be divided into three types: piezoelectr...

AI Technical Summary

Problems solved by technology

The traditional capacitive pressure sensor uses a sensitive film and parallel electrodes to form a plate capacitance, and calculates the external pressure by measuring the capacitance that changes with the deformation caused by the internal and external pressure difference. It has small input energy, high sensitivity, large relative changes in electrical parameters, and stability. Good and other advantages, it has great application potential in some harsh working environments, but the structure of the plate capacitor limits its application range

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