Preparation method of chromium nitride/titanium aluminum zirconium chromium nitride multiple double-layer hard film

Abstract

The invention discloses a preparation method of chromium nitride / titanium aluminum zirconium chromium nitride multiple double-layer hard film. The preparation method comprises the following steps: 1, determination of precipitation; 2, selection of target material components; 3, selection and pretreatment process of workpieces; 4, pre-bombardment process; 5, precipitation process; 6, heating and cooling process; 7, rotating process of the workpieces; 8, obtaining of the chromium nitride / titanium aluminum zirconium chromium nitride multiple double-layer hard film according to the preparation method provided by the invention. By adopting the preparation method, the high hardness and high film / substrate binding force of the film are guaranteed, the abrasion resistance of the film is improved, particularly, the heat resistance of the film is improved, the work efficiency is improved and the coating film cost is reduced; the method is simple and easy to operate.

Description

technical field [0001] The invention relates to a preparation method of a multi-component double-layer hard reaction film, in particular to a preparation method of a multi-component double-layer hard film of chromium nitride / titanium aluminum zirconium chromium. Background technique [0002] Multi-arc ion plating has the advantages of high ionization rate, low deposition temperature, fast film formation rate, strong binding force, dense film structure and easy adjustment of process parameters. This technology is suitable for the preparation of multi-component composite hard films, and is suitable for the preparation of titanium-based multi-component single-layer and multi-component gradient hard films such as titanium nitride, titanium aluminum nitride, titanium aluminum zirconium nitride, and titanium aluminum chromium nitride. have been successfully applied. [0003] Titanium aluminum zirconium chromium quaternary nitride hard film is more effective than titanium nitride ...

AI Technical Summary

Problems solved by technology

Therefore, the main disadvantage of this film is that its hardness, film / substrate bonding force, wear resistance and heat resistance cannot meet the cutting requirements under extremely harsh conditions.

[0005] For the titanium aluminum zirconium chromium series quaternary film with gradient structure, although the hardness, film / substrate bonding force, wear resistance and heat resistance of the film are greatly improved, the main disadvantage of the film is that its preparation method is relatively complicated. Need to continuously adjust nitrogen flow or target arc current, low efficiency