Preparation method of titanium nitride aluminum zirconium/titanium nitride aluminum zirconium chromium multi-element double-layer hard film

A technology of titanium aluminum zirconium chromium nitride and titanium aluminum nitride, which is applied in the field of preparation of multi-layer double-layer hard reaction film, can solve the problem that the hardness, wear resistance and heat resistance cannot meet the cutting requirements, the preparation method is complicated, and the efficiency is low and other problems, to achieve the effect of high temperature oxidation resistance, simple and easy preparation process, and low friction coefficient

Inactive Publication Date: 2014-01-01
SHENYANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, the main disadvantage of this film is that its hardness, film/substrate bonding force, wear resistance and heat resistance cannot meet the cutting requirements under extremely harsh conditions.
[0005] For the titanium aluminum zirconium chromium series quaternary film with gradient struct

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0020] Prepare titanium aluminum zirconium nitride / titanium aluminum zirconium chromium multi-layer hard reaction film on WC-8%Co hard alloy workpiece, the method is:

[0021] 1. Determination of deposition technology: Determine the multi-arc ion plating technology as the deposition technology of titanium aluminum zirconium nitride / titanium aluminum zirconium chromium nitride double layer hard reaction film.

[0022] 2. Selection of target material composition: A combination of a chromium target and two titanium-aluminum-zirconium alloy targets is selected. The three targets are arranged at 90 degrees to each other. The middle arc source is a chromium target with a purity of 99.99%. The arc sources on both sides are It is a titanium-aluminum-zirconium alloy target, and the atomic ratio of titanium: aluminum: zirconium is 63:32:5.

[0023] 3. The selection and pretreatment process of the workpiece: WC-8%Co cemented carbide is selected as the workpiece material, and the surface ...

Embodiment 2

[0031] Prepare titanium aluminum zirconium nitride / titanium aluminum zirconium chromium multi-layer hard reaction film on WC-8%Co hard alloy workpiece, the method is:

[0032] 1. Determination of deposition technology: Determine the multi-arc ion plating technology as the deposition technology of titanium aluminum zirconium nitride / titanium aluminum zirconium chromium nitride double layer hard reaction film.

[0033] 2. Selection of target material composition: A combination of a chromium target and two titanium-aluminum-zirconium alloy targets is selected. The three targets are arranged at 90 degrees to each other. The middle arc source is a chromium target with a purity of 99.99%. The arc sources on both sides are It is a titanium-aluminum-zirconium alloy target, and the atomic ratio of titanium: aluminum: zirconium is 63:32:5.

[0034] 3. The selection and pretreatment process of the workpiece: WC-8%Co cemented carbide is selected as the workpiece material, and the surface ...

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Abstract

The invention relates to a preparation method of a titanium nitride aluminum zirconium/titanium nitride aluminum zirconium chromium multi-element double-layer hard film. The preparation method comprises the steps: 1, determination of a deposition technology; 2, selection of target material components; 3, a workpiece selecting and preprocessing process; 4, a pre-bombarding process; 5, a deposition process; 6, a heating and cooling process; 7, a workpiece rotating process; 8, the titanium nitride aluminum zirconium/titanium nitride aluminum zirconium chromium multi-element double-layer hard film can be obtained according to the preparation method provided by the invention. According to the preparation method of the titanium nitride aluminum zirconium/titanium nitride aluminum zirconium chromium multi-element double-layer hard film, the binding force between the film and a matrix is enhanced, the heat resistance of the film is enhanced, in particular, the hardness and the wear resistance of the film are improved; the method is simple and easy to operate, the work efficiency is greatly improved, and the cost of film coating is reduced.

Description

technical field [0001] The invention relates to a preparation method of a multi-component double-layer hard reaction film, in particular to a preparation method of a titanium-aluminum-zirconium nitride / titanium-aluminum-zirconium-chromium multi-layer hard film. Background technique [0002] Multi-arc ion plating has the advantages of high ionization rate, low deposition temperature, fast film formation rate, strong binding force, dense film structure and easy adjustment of process parameters. This technology is suitable for the preparation of multi-component composite hard films, and is suitable for the preparation of titanium-based multi-component single-layer and multi-component gradient hard films such as titanium nitride, titanium aluminum nitride, titanium aluminum zirconium nitride, and titanium aluminum chromium nitride. have been successfully applied. [0003] Titanium aluminum zirconium chromium quaternary nitride hard film is more effective than titanium nitride h...

Claims

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Application Information

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IPC IPC(8): C23C14/32C23C14/06C23C14/54C23C14/02
Inventor 赵时璐张钧张震
Owner SHENYANG UNIV
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