Preparation method of titanium nitride aluminum zirconium/titanium nitride aluminum zirconium chromium multi-element double-layer hard film

Abstract

The invention relates to a preparation method of a titanium nitride aluminum zirconium / titanium nitride aluminum zirconium chromium multi-element double-layer hard film. The preparation method comprises the steps: 1, determination of a deposition technology; 2, selection of target material components; 3, a workpiece selecting and preprocessing process; 4, a pre-bombarding process; 5, a deposition process; 6, a heating and cooling process; 7, a workpiece rotating process; 8, the titanium nitride aluminum zirconium / titanium nitride aluminum zirconium chromium multi-element double-layer hard film can be obtained according to the preparation method provided by the invention. According to the preparation method of the titanium nitride aluminum zirconium / titanium nitride aluminum zirconium chromium multi-element double-layer hard film, the binding force between the film and a matrix is enhanced, the heat resistance of the film is enhanced, in particular, the hardness and the wear resistance of the film are improved; the method is simple and easy to operate, the work efficiency is greatly improved, and the cost of film coating is reduced.

Description

technical field [0001] The invention relates to a preparation method of a multi-component double-layer hard reaction film, in particular to a preparation method of a titanium-aluminum-zirconium nitride / titanium-aluminum-zirconium-chromium multi-layer hard film. Background technique [0002] Multi-arc ion plating has the advantages of high ionization rate, low deposition temperature, fast film formation rate, strong binding force, dense film structure and easy adjustment of process parameters. This technology is suitable for the preparation of multi-component composite hard films, and is suitable for the preparation of titanium-based multi-component single-layer and multi-component gradient hard films such as titanium nitride, titanium aluminum nitride, titanium aluminum zirconium nitride, and titanium aluminum chromium nitride. have been successfully applied. [0003] Titanium aluminum zirconium chromium quaternary nitride hard film is more effective than titanium nitride h...

AI Technical Summary

Problems solved by technology

Therefore, the main disadvantage of this film is that its hardness, film / substrate bonding force, wear resistance and heat resistance cannot meet the cutting requirements under extremely harsh conditions.

[0005] For the titanium aluminum zirconium chromium series quaternary film with gradient structure, although the hardness, film / substrate bonding force, wear resistance and heat resistance of the film are greatly improved, the main disadvantage of the film is that its preparation method is relatively complicated. Need to continuously adjust nitrogen flow or target arc current, low efficiency