Magneto-rheological high-precision positioning device and magneto-rheological removing function transformation method

Abstract

The invention discloses a magneto-rheological high-precision positioning device and a magneto-rheological removing function transformation method. The device comprises a fixed supporting mechanism, an excircle positioning mechanism and an end surface positioning mechanism. The method comprises the following steps of selecting an optical element substrate which is conventionally processed to measure single point removing efficiency, establishing a removing efficiency contrast coefficient library, measuring the removing efficiency of four points by using a microcrystal material, converting the removing efficiency into the removing efficiency of a workpiece to be processed, adjusting the positions of the excircle positioning mechanism, the end surface positioning mechanism and a slide block through a hand wheel and a screw rod, placing the workpiece, performing emulating calculation on the workpiece surface error through the converted removing efficiency of the workpiece to be processed, and fitting a production machine tool code to perform numerical control machining. The magneto-rheological high-precision positioning device has the advantages of high integration level and high positioning precision as well as improving removing function accuracy, shortening measuring time, improving processing efficiency, reducing processing material cost and the like and can be used for quickly processing plane and high-gradient spherical surface, non-spherical surface and free spherical surface optical elements.

Description

technical field [0001] The invention relates to the technical field of high-precision machining of magnetorheological technology, in particular to a magnetorheological high-precision positioning device and a magnetorheological removal function conversion method. The supporting device and method can be applied to plane, spherical, aspherical and free Surface and other optical components processing. Background technique [0002] With the continuous development of the performance of modern optical systems, the quality requirements of optical components are also continuously improved. In order to improve the imaging quality of the optical system and reduce the cost, modern optical parts are developing towards the trend of aspheric surface, large relative aperture and nanometer precision. For example, the 193nm deep ultraviolet lithography system requires the surface shape accuracy of high-steep spherical surfaces and high-order aspheric surfaces to be less than RMS2nm, and the ...

AI Technical Summary

Problems solved by technology

However, the imported optical materials used in the high-precision optical system are relatively expensive, and the cost of using the same material for the removal function is high. At the same time, in the production process, materials such as zinc selenide and Si are relatively soft, and it is difficult to control the finish. Using this material to obtain the removal function, The stability is usually less than 70%, which directly affects the processing cost and efficiency of magnetorheological production

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