Discharge ionization current detector
An ionization current and current detection technology, applied in the direction of measuring current/voltage, instruments, measuring devices, etc., can solve the problems of low minimum detection amount, low ionization efficiency, low dynamic range, etc., to improve the detection limit, suppress the baseline current, less variable effect
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[0030] refer to figure 1 A discharge ionization current detector according to an embodiment of the present invention will be described. figure 1 It is a schematic configuration diagram of the discharge ionization current detector of this embodiment.
[0031] In the discharge ionization current detector of this embodiment, the inside of the cylindrical tube 2 made of a dielectric becomes the first gas flow path 3, and the outer wall surface of the cylindrical tube 2 is surrounded by metal ( Ring-shaped plasma generation electrodes 4 , 5 , 6 made of, for example, SUS or copper. Since the wall surface of the cylindrical tube 2 exists between the electrodes 4, 5, 6 for plasma generation and the first gas flow path 3, the wall surface itself of the dielectric serves as the surface covering the electrodes 4, 5, 6 for plasma generation. The dielectric coating layer functions to perform dielectric barrier discharge. A gas supply pipe 7 is connected to the upper end of the cylindric...
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