Reverse thermal bonding technology for making micro and nano fluid system with controllable size
A fluid system, micro-nano technology, applied in micro-structure technology, manufacturing of micro-structure devices, decorative arts, etc., can solve problems such as low success rate, low channel strength, uneven packaging layer, etc., to reduce production costs and experimental operations. Simple, powerful effects
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[0030] In this embodiment, the method for fabricating a size-controllable micro-nano fluid system by reverse thermal bonding technology operates as follows:
[0031] 1. Glass grating template in concentrated H 2 SO 4 and hydrogen peroxide mixed solution (volume ratio 2: 1) after soaking for two hours, rinsed with deionized water. Then dry it with nitrogen and put it in an oven at 130°C for 30 minutes. After cooling, spin-coat a layer of DC20 mold release agent on the grating template, and heat it on a hot stage at 85-95°C for 15 minutes. The function of the mold release agent is to change the surface energy of the template, so that the cured SU-8 Photoresist can be easily desorbed. At this point, the pretreatment of the glass template is complete.
[0032] 2. Spin-coat a layer of SU-8 photoresist on the processed grating template. The solvent of this layer of photoresist is toluene, which is used to change the polarity of the SU-8 photoresist. Experiments have proved that ...
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