Terahertz signal detection device

Abstract

The invention discloses a terahertz signal detection device which comprises an integrated chip. A low-temperature semiconductor reading circuit and a superconductor detector are simultaneously arranged on the integrated chip, the low-temperature semiconductor reading circuit and the superconductor detector are mutually communicated, and the superconductor detector is used for detecting a terahertz signal. The terahertz signal detection device can not only reduce system noise, and improve sensitivity, working stability and operation speed of a superconductor terahertz direct detector, but also facilitates designing and manufacturing of an imaging system of a terahertz two-dimensional detection array based on a multichannel reading circuit. The terahertz signal detection device can integrate a superconductor component and a semiconductor component on the same chip, and can easily achieve metal thin film wire leading through micromachining technology. Due to the fact that an integration level is improved, a bonding pad is greatly reduced, and therefore, the aims that noise is reduced and systematic operation speed is improved are achieved.

Description

technical field [0001] The invention relates to the field of signal detection, in particular to a terahertz signal detection device. Background technique [0002] Terahertz (THz) (1THz = 10 12 Hz) waves generally refer to electromagnetic radiation with a frequency in the range of 0.1THz to 10THz (wavelength 3mm to 30μm). From the perspective of frequency, this band is between millimeter waves and infrared rays, and belongs to the far-infrared band; from the perspective of energy, terahertz waves are between electrons and photons. In the electromagnetic spectrum, the infrared and microwave technologies on both sides of the terahertz band are very mature, but the terahertz technology is basically "blank". , is not completely suitable for microwave theory to study, thus forming the so-called "terahertz gap". [0003] Before the mid-1980s, due to the lack of effective terahertz generation methods and detection methods, scientists had very limited understanding of the nature o...

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Problems solved by technology

[0003] Before the mid-1980s, due to the lack of effective terahertz generation methods and detection methods, scientists had very limited understanding of the nature of electromagnetic radiation in this band

As mentioned earlier, this connection method also cannot avoid the influence of connecting wires on the system.

[0018] In summary, in the research on the imaging system of the high-sensitivity superconducting terahertz two-dimensional detection array, previous research has focused on using more optimized circuit design and detector manufacturing process to improve the detection efficiency and resolution of the detector. However, it does not take into account the instability caused by the connection from the detector to the readout circuit due to heat exchange, etc., which will bring additional noise and instability to the detector system, making the final imaging effect worse

In addition, the existing designs are not convenient for multi-channel detection imaging

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