Corona preionization device

Abstract

The invention provides a corona preionization device which comprises corona outside electrodes arranged in a concentric mode, dielectric pipes and corona inner electrodes. The corona inner electrodes are arranged inside the dielectric pipes and the radius of the corona inner electrode is slightly less than that of the dielectric pipe. The corona outside electrodes are connected with a first main discharging electrode of a discharge chamber in an electric way. The corona inner electrodes are connected with a second main discharging electrode of the discharge chamber through a lead. Higher preionization electron density distributed evenly is obtained by using widespread corona outside electrodes and dielectric pipes to form barriers with intervals to discharge. UV (ultra violet) radiation is limited in the main discharging area by the outside electrodes; thereby the use ratio of UV is enhanced and harmful arc and parasitic discharging are avoided. The structure of the corona electrode is compact with no effect on work gas flowing. The method that the corona inner electrode with radius slightly less than that of the dielectric pipe is used, one end of the inner electrode is fixed and the other end is in flexible connection through clips eliminates effect of inner electrode thermal expansion due to long time operation and improves the long time operation stability of the preionization device.

Description

Technical field [0001] The invention belongs to gas laser pre-ionization technology, and specifically relates to a corona pre-ionization structure device, in particular to a corona pre-ionization device that can produce uniformly distributed high pre-ionization electron density and stable performance Background technique [0002] The performance of pulsed lasers (mainly including maximum injection energy density and laser beam quality), especially large-volume TEA CO 2 , Excimer lasers with high repetition rate are greatly affected by the degree of pre-ionization of the gas medium (ie the initial electron density and its distribution before the main discharge). The most common ultraviolet pre-ionization techniques include spark needle pre-ionization (using a thermal arc to emit strong ultraviolet light) and corona pre-ionization. Because the gas life of spark pre-ionization is shorter than corona pre-ionization, and the working mode of spark pre-ionization will contaminate variou...

AI Technical Summary

Problems solved by technology

[0004] In order to overcome many disadvantages of existing corona pre-ionization devices such as weak pre-ionization strength, uneven discharge, easy arcing, harmful parasitic discharges, poor stability, etc., the present invention provides a new type of corona pre-ionization device, The device can not only obtain a uniformly distributed higher pre-ionization electron density, but also solve the problem of thermal influence of the pre-ionization structure

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