Method for preparing PDMS chip including both square and arc-shaped channel
An arc-shaped channel and square technology is applied in the field of preparation of microfluidic chips, which can solve the problems of complex process steps, stagnant synthetic materials, and low success rate, and achieve the effect of simple and fast process and controllable arc.
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Embodiment 1
[0026] as per figure 1 The steps shown further illustrate the implementation steps and substantive features of the method:
[0027] (1) A cross-linked SU-8 positive mold containing microchannel patterns was prepared by standard photolithography, and the microprotrusions contained were rectangular squares;
[0028] (2) Preparation of female PDMS: Clamp the cross-linked SU-8 male mold with a certain thickness of liquid PDMS. After the PDMS is cured, the female PDMS with the positive mold pattern reversed is obtained after the PDMS is opened, and the female PDMS is attached. On the glass sheet and silanized to facilitate subsequent demoulding;
[0029] (3) Preparation of uncrosslinked SU-8 positive mold: 150 micron thick solid uncrosslinked SU-8 photoresist removes air bubbles in advance, and clamps it with the PDMS female mold attached to the glass plate and puts it in a vacuum In the oven, after the inside of the oven is evacuated, the temperature is raised to 100°C and maint...
Embodiment 2
[0034] as per figure 1 In the steps shown, the liquid circuit layer in the chip integrated with the microvalve structure is prepared.
[0035] (1) A cross-linked SU-8 positive mold containing microchannel patterns was prepared by standard photolithography, and the microprotrusions contained were rectangular squares;
[0036] (2) Preparation of female PDMS: Clamp the cross-linked SU-8 male mold with a certain thickness of liquid PDMS. After the PDMS is cured, the female PDMS with the positive mold pattern reversed is obtained after the PDMS is opened, and the female PDMS is attached. On the glass sheet and silanized to facilitate subsequent demoulding;
[0037] (3) Preparation of uncrosslinked SU-8 positive mold: 150 micron thick solid uncrosslinked SU-8 photoresist removes air bubbles in advance, and clamps it with the PDMS female mold attached to the glass plate and puts it in a vacuum In the oven, after the inside of the oven is evacuated, the temperature is raised to 100°...
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