Cage-type heating unit for crystal growth

Abstract

The invention relates to a cage-type heating unit for crystal growth, belonging to the field of artificial crystals. A plurality of heating rods (6) are annularly arranged in a staggered mode; the lower part of the annularly arranged heating rods (6) is connected with at least two bases (10); a complete circle is uniformly divided into the at least two bases (10); an interval is arranged between the butt surfaces of every two adjacent bases (10); the middle part of the annularly arranged heating rods (6) is provided with series connection mechanisms which have the same quantity and same structure as the bases (10) and are connected with the same heating rods (6) in series, so that the heating rods (6) form a cage-type structure heating unit; and the bases (10) are connected with a negative electrode (14) and a positive electrode (13), so that the cage-type heating unit forms an heating electrode layout of which the electrodes converge via the upper part. The invention adopts the multivalve cage-type heating form, and acquires balanced temperature field distribution of the heating unit; and the invention is especially suitable for multi-temperature area requirements for large-size high-melting-point crystal growth.

Description

【Technical field】 [0001] The invention relates to the field of artificial crystals, in particular the invention relates to a cage heating device for crystal growth. 【Background technique】 [0002] It is known that there are many types of artificial crystals, such as monocrystalline silicon and polycrystalline silicon used in solar power generation, sapphire substrate materials used as LEDs, etc.; these artificial crystals are usually drawn using crucibles during processing. The heating of the crucible in the process uses a heating jacket surrounding the crucible; the conventional heating jacket is a ring structure with staggered gaps up and down, the upper part is set to be open, and the lower part is provided with at least two supports, each of which is connected to the power supply. The positive electrode and the negative electrode are made of graphite, tungsten, molybdenum, copper or other conductors. Due to the process requirements in the production of the aforementioned...

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Problems solved by technology

[0003] Chinese patent CN101323984A "patent name, a heating device for the growth of large-scale high-melting point crystals and its manufacturing method; application date, July 23, 2008; publication date, December 17, 2008" discloses a birdcage-shaped Heating device, the device uses a plurality of copper rings corresponding to the upper and lower sides, and inserts tungsten rods between the copper rings. The layers are divided into upper layer, middle layer and lower layer. The different surfaces are interlaced with each other, forming a temperature field distribution with the top low and the bottom high, and the center is low and the sides are high. However, the overall copper ring makes it impossible for the lower part to expand and shrink when placed in use. , it is difficult to get close to the crucible, and the electrodes can only be set in one group; in addition, use tungsten rods in

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