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Production technology of silicon tetrafluoride

A silicon tetrafluoride and production process technology, applied in the direction of silicon halide compounds, halosilanes, etc., can solve the problems of high production cost of polysilicon, high production raw material cost, high energy consumption in the production process, and achieve less reaction materials and low raw material cost Low, the effect of small environmental pollution hazards

Active Publication Date: 2013-01-30
SHANDONG RUIFU LITHIUM IND
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the production of silicon tetrafluoride is mainly based on the sulfuric acid rotary kiln production technology using fluorite and quartz as raw materials. The cost of raw materials is high, the energy consumption in the production process is high, the reaction temperature is high (250°C-300°C), and the yield is low. directly lead to the high production cost of polysilicon

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0023] 1) Preheat the raw materials sodium fluorosilicate and silicon dioxide with a molar ratio of 1:0.1 to 100°C in a desiccator, dry and stir evenly;

[0024] 2) Transfer the dried sodium fluorosilicate and silica powder mixture into the reactor, spray into the H2O preheated to 70°C 2 SO4 content is the concentrated sulfuric acid of 98.0% to carry out stirring reaction, the H in the described sodium fluorosilicate and the concentrated sulfuric acid 2 The molar ratio of SO4 is 1:0.8, and the reactor is continuously heated during the reaction to keep the reaction temperature at 100°C;

[0025] 3) The gas generated during the reaction is extracted in time. The gas components are silicon tetrafluoride, hydrogen fluoride, water vapor and dust. After being washed with concentrated sulfuric acid to remove dust, absorb hydrogen fluoride, dehydrate, and remove acid mist, it enters the compressor for compression to obtain tetrafluoroethylene The molar concentration of the silicon di...

Embodiment 2

[0027] 1) Preheat the raw materials sodium fluorosilicate and silicon dioxide with a molar ratio of 1:0.5 to 70°C in a desiccator, dry and stir evenly;

[0028] 2) Transfer the dried sodium fluorosilicate and silica powder mixture into the reactor, spray into the H2O preheated to 100°C 2 The concentrated sulfuric acid of SO4 content 99.0% carries out stirring reaction, and the H in the described sodium fluorosilicate and the concentrated sulfuric acid 2 The molar ratio of SO4 is 1:1.1, and the reactor is continuously heated during the reaction to keep the reaction temperature at 150°C;

[0029] 3) The gas generated during the reaction is extracted in time. The gas components are silicon tetrafluoride, hydrogen fluoride, water vapor and dust. After being washed with concentrated sulfuric acid to remove dust, absorb hydrogen fluoride, dehydrate, and remove acid mist, it enters the compressor for compression to obtain tetrafluoroethylene Siliconization product, the solid reactio...

Embodiment 3

[0031] 1) Preheat the raw materials sodium fluorosilicate and silicon dioxide with a molar ratio of 1:1.0 to 180°C in a desiccator, dry and stir evenly;

[0032] 2) Transfer the dried sodium fluorosilicate and silica powder mixture into the reactor, spray into the H2O preheated to 120°C 2 The concentrated sulfuric acid of SO4 content 98.0% carries out stirring reaction, and the H in the described sodium fluorosilicate and the concentrated sulfuric acid 2 The molar ratio of SO4 is 1:1.3, and the reactor is continuously heated during the reaction to keep the reaction temperature at 200°C;

[0033] 3) The gas generated during the reaction is extracted in time. The gas components are silicon tetrafluoride, hydrogen fluoride, water vapor and dust. After being washed with concentrated sulfuric acid to remove dust, absorb hydrogen fluoride, dehydrate, and remove acid mist, it enters the compressor for compression to obtain tetrafluoroethylene The molar content of the silicon dioxide...

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PUM

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Abstract

The invention discloses a production technology of silicon tetrafluoride, and relates to the field of fluorosilicone material production. According to the invention, measured raw materials sodium fluoride and silica powder are dried in a drier and are uniformly stirred; the preheated and dried sodium fluoride and silica powder are mixed, and the mixture is added into a reactor; concentrated sulfuric acid with a measured total amount is sprayed in; the mixture is stirred and heated, and a reaction is carried out under a certain temperature; gas produced during the reaction process is extracted in time; washing and impurity-removing are carried out; and compression is carried out, such that a silicon tetrafluoride product is obtained. According to the invention, production is carried out by using sodium fluoride obtained during fluorine-containing gas recovery treatment processes of fluorine chemical industry and phosphate fertilizer industry, and silica gel waste materials. The raw material cost is low, reaction temperature is low, energy consumption is low, and yield is high. With the technology, polysilicon production requirements can be satisfied, and polysilicon production cost can be greatly reduced.

Description

technical field [0001] The invention relates to the field of production of fluorosilicon materials, in particular to a production process of silicon tetrafluoride. Background technique [0002] Silicon tetrafluoride is the main raw material in high-tech fields such as polysilicon, and the low-cost silicon tetrafluoride production technology is of great significance for reducing the production cost of polysilicon. At present, the production of silicon tetrafluoride is mainly based on the sulfuric acid rotary kiln production technology using fluorite and quartz as raw materials. The cost of raw materials is high, the energy consumption in the production process is high, the reaction temperature is high (250°C-300°C), and the yield is low. This directly leads to the high production cost of polysilicon. Contents of the invention [0003] In order to solve the above-mentioned technical problems, the present invention provides a silicon tetrafluoride production process, which u...

Claims

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Application Information

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IPC IPC(8): C01B33/107
Inventor 旷戈刘绪凯郭园万金诚韩光占米永强
Owner SHANDONG RUIFU LITHIUM IND
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