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High-strength aluminum nitride ceramic substrate and manufacturing method thereof

A technology of aluminum nitride ceramics and a manufacturing method, applied in the field of ceramic substrates, can solve problems such as reduced thermal conductivity, and achieve the effects of high bending strength and high thermal conductivity

Active Publication Date: 2012-12-19
FUJIAN HUAQING ELECTRONICS MATERIAL TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Chinese Patent Publication No. 03825296.1 discloses an aluminum nitride sintered body, which adopts pulse current rapid sintering and subsequent long-term heat treatment to obtain a dense aluminum nitride sintered body with small grains. The sintered body has high strength and meets the requirements of The requirements of mirror polishing can be applied to high-precision fine wiring, but there is also the problem of reduced thermal conductivity

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0024] A high-strength aluminum nitride ceramic substrate, which is formed by casting slurry through tape casting and high-temperature sintering. The components and contents of the casting slurry are: aluminum nitride powder (Deshan Soda Commercial aluminum nitride powder) 1000g, 50g of diyttrium trioxide, 0.5g of fumed silica with a particle size of 0.05μm, 430g of a mixture of absolute ethanol and butanol at a ratio of 1:2 (weight ratio), 20g of fish oil , polyvinyl butyral 100g, dibutyl phthalate 50g.

[0025] Its manufacturing method includes the following steps: (1) Preparation of casting slurry: 1000g of aluminum nitride powder, 50g of diyttrium trioxide, 0.5g of fumed silica with a particle size of 0.05μm, and 230g of A mixture of absolute ethanol and butanol mixed at a ratio of 1:2 (weight ratio), 20g of fish oil, ball milled and mixed for 24 hours, and then mixed with 200g of absolute ethanol and butanol at a ratio of 1:2 (weight ratio), The polyvinyl butyral of 100g...

Embodiment 2

[0029] A high-strength aluminum nitride ceramic substrate, which is formed by casting slurry through tape casting and high-temperature sintering. The components and contents of the casting slurry are: aluminum nitride powder (Deshan Soda Commercial aluminum nitride powder) 1010g, 50g of diyttrium trioxide, 1g of fumed silica with a particle size of 0.1μm, 440g of a mixture of absolute ethanol and butanol at a ratio of 1:2 (by weight), 25g of fish oil, Polyvinyl butyral 110g, dibutyl phthalate 60g.

[0030] Its manufacturing method includes the following steps: (1) Preparation of casting slurry: 1010g of aluminum nitride powder, 50g of diyttrium trioxide, 1g of fumed silica with a particle size of 0.1μm, 240g of A mixture of water ethanol and butanol mixed at a ratio of 1:2 (weight ratio), 25g of fish oil, ball milled and mixed for 24 hours, and then mixed with 200g of absolute ethanol and butanol at a ratio of 1:2 (weight ratio), 110g The polyvinyl butyral and the dibutyl pht...

Embodiment 3

[0034] A high-strength aluminum nitride ceramic substrate, which is formed by casting slurry through tape casting and high-temperature sintering. The components and contents of the casting slurry are: aluminum nitride powder (Deshan Soda Commercial aluminum nitride powder) 1020g, 50g of diyttrium trioxide, 3g of fumed silica with a particle size of 0.2μm, 450g of a mixture of absolute ethanol and butanol at a ratio of 1:2 (weight ratio), 26g of fish oil, Polyvinyl butyral 115g, dibutyl phthalate 65g.

[0035] Its manufacturing method includes the following steps: (1) Preparation of casting slurry: 1020g of aluminum nitride powder, 50g of diyttrium trioxide, 3g of fumed silica with a particle size of 0.2μm, 230g of A mixture of water ethanol and butanol mixed at a ratio of 1:2 (weight ratio), 26g of fish oil and ball milled for 24 hours, and then mixed with 220g of absolute ethanol and butanol at a ratio of 1:2 (weight ratio), 115g The polyvinyl butyral and the dibutyl phthala...

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Abstract

The invention relates to a ceramic substrate and provides a high-strength aluminum nitride ceramic substrate having high bending strength and heat conductivity and a manufacturing method of the high-strength aluminum nitride ceramic substrate. The high-strength aluminum nitride ceramic substrate is prepared from tape-casting slurry by tape casting and high-temperature sintering, wherein the tape-casting slurry comprises the following components in parts by weight: 95-105 parts of aluminum nitride powder, 4-8 parts of rare earth oxide, 0.05-0.5 part of silicon-containing oxide, 40-45 parts of solvent, 1-3 parts of dispersing agent, 8-12 parts of bonding agent and 3-7 parts of plasticizer.

Description

technical field [0001] The invention relates to a ceramic substrate, in particular to a high-strength aluminum nitride ceramic substrate and a manufacturing method thereof. Background technique [0002] With the improvement of the integration of high-power module circuits and the development of high-power LEDs, higher requirements are placed on the insulating substrate materials used. Aluminum nitride ceramic materials have been widely used in various large-scale applications due to their high thermal conductivity. Insulating substrate material for power electronic components. However, in some miniaturization applications, in addition to high thermal conductivity, aluminum nitride ceramic substrates are also required to have high mechanical properties, especially in thin plates with a thickness of less than 0.38mm, aluminum nitride ceramic substrates are required Has high flexural strength. In some heat dissipation substrates of power components or bracket applications of...

Claims

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Application Information

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IPC IPC(8): C04B35/582C04B35/622
Inventor 杨大胜施纯锡
Owner FUJIAN HUAQING ELECTRONICS MATERIAL TECH
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