Flexible tubular microelectrode and preparation method thereof

A micro-electrode and tubular technology, applied in the field of micro-electrode and its preparation, can solve the problems of unsuitable use of rigid nerve electrodes, complicated manufacturing process, and high cost of electrode production, so as to facilitate processing and integration of implantable medical equipment and low cost , less prone to tissue damage

Inactive Publication Date: 2012-12-12
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The disadvantage is that rigid nerve electrodes made of silicon substrates are not suitable for implantable medical equipment, and are prone to tissue damage; the manufacturing process is relatively complicated, and the electrode manufacturing cost is high

Method used

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  • Flexible tubular microelectrode and preparation method thereof
  • Flexible tubular microelectrode and preparation method thereof
  • Flexible tubular microelectrode and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0024] Such as figure 1 Shown, the present embodiment is prepared according to the following steps:

[0025] 1. Cut off a polyimide capillary with an outer diameter of 0.1 mm and clean it with ultrasonic vibration in deionized water;

[0026] 2. Sputter a titanium / tungsten / gold layer of 100-200 nanometers on the surface of the capillary, of which 30 nanometers of the titanium / tungsten layer is the bonding layer;

[0027] 3. Chemical vapor deposition of a parylene insulating layer of 3 to 10 microns on the capillary surface of the sputtered metal layer;

[0028] 4. Use a laser with a wavelength of 266 nm to etch away the surface insulating layer at a specific part of the capillary, with an etching width of 10-100 microns, to expose the electrode point of the metal layer, and obtain a polyimide tube gold microelectrode with an electrode point.

Embodiment 2

[0030] Such as figure 2 Shown, the present embodiment is prepared according to the following steps:

[0031] 1. Cut off a polyimide capillary with an outer diameter of 0.3 mm and clean it with ultrasonic vibration in deionized water;

[0032] 2. Sputtering a titanium / tungsten / platinum layer of 100-200 nanometers on the surface of the capillary, of which 30 nanometers of the titanium / tungsten layer is the bonding layer;

[0033] 3. Coating a polyimide insulating layer of 3 to 10 microns on the capillary surface of the sputtered metal layer;

[0034] 4. Use a laser with a wavelength of 266 nanometers to etch away the surface insulating layer at two specific parts of the capillary, with an etching width of 10-100 microns, to expose the metal layer electrode points, and obtain a polyimide tube platinum microelectrode with two electrode points.

Embodiment 3

[0036] Such as image 3 Shown, the present embodiment is prepared according to the following steps:

[0037] 1. Cut off a polytetrafluoroethylene capillary with an outer diameter of 0.3 mm and clean it with ultrasonic vibration in deionized water;

[0038] 2. Sputtering a titanium / tungsten / platinum layer of 100-200 nanometers on the surface of the capillary, of which 30 nanometers of the titanium / tungsten layer is the bonding layer;

[0039] 3. Chemical vapor deposition of a parylene insulating layer of 3 to 10 microns on the capillary surface of the sputtered metal layer;

[0040] 4. Using a laser with a wavelength of 266 nanometers to etch away the surface insulating layer at four specific parts of the capillary, the etching width is 10-100 microns, exposing the electrode points of the metal layer, and obtaining platinum microelectrodes of PTFE tubes with four electrode points.

[0041] It should be understood that the above are some embodiments of the present inventio...

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Abstract

The invention discloses a flexible tubular microelectrode and a preparation method thereof. The preparation method comprises the following steps of: firstly, cutting a section of a polymer capillary; secondly, sputtering a metal layer on the surface of the polymer capillary; thirdly, deposing a polymer on the surface of the capillary as an electrode insulation layer; and at last, etching the polymer insulation layer on the surface of the capillary by utilizing laser, and exposing a metal electrode point to obtain the tubular microelectrode. According to the flexible tubular microelectrode prepared by the invention, when electric simulation and electrographic recording are carried out on a physiological tissue by the electrode, a fluid medicine is transported to a tissue organ by a microtubule channel, and a flexible micro-size is beneficial for test or experiment operation and production of an embedded medical device.

Description

technical field [0001] The invention relates to a microelectrode in the technical field of biomedical engineering and a preparation method thereof, in particular to a flexible tubular microelectrode and a preparation method thereof. Background technique [0002] Functional electrical stimulation (FES) medical equipment is used to simulate motor nerves to apply electrical stimulation to specific muscle groups to help paralyzed patients recover muscle reconstruction and do rehabilitation training. However, since muscles are not only controlled by motor nerve electrical signals to expand and contract, but also need to obtain necessary nutrients from nerve cells, only functional electrical stimulation of muscles will lead to tissue atrophy and eventually necrosis due to malnutrition. The flexible tubular microelectrode can perform functional electrical stimulation on the paralyzed muscle site, and at the same time perform microfluidic drug delivery to the paralyzed site to deliv...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81C1/00B81B1/00A61N1/05A61M37/00
Inventor 刘景全田鸿昌康晓洋杨斌杨春生
Owner SHANGHAI JIAO TONG UNIV
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