FePt/X nano composite film for ultrahigh-density magnetic recording and preparation method thereof
A composite film and composite film technology, applied in the direction of coating with magnetic layer, record carrier manufacturing, sputtering coating, etc., can solve the problem of difficult to obtain fine particles, uniform distribution, small exchange coupling between particles, and difficult to control. Thin film microstructure and other issues, to achieve the effects of low cost, small exchange coupling between particles, and good magnetic properties
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Embodiment 1
[0027] 1. Preparation method
[0028] 1) First, clean the glass substrate in an alcohol solution using an ultrasonic cleaning device, and dry it with compressed air. Use tweezers to place the cleaned and dried glass substrate on the sample base of the sputtering chamber; wait until the vacuum at the back of the sputtering chamber reaches 1.2 ×10 -5 At Pa, a layer of orientation (200) MgO induction layer was deposited on a clean glass substrate by radio frequency magnetron sputtering technology, and its thickness was 5nm.
[0029] 2) Then continue to alternately deposit FePt (4nm) and Ag (4nm) on this induction layer to obtain [FePt(4nm) / Ag(4nm)] 5 Multi-layer film, including 5 layers of FePt thin film and Ag thin film. When sputtering the FePt layer and the Ag layer, the substrate temperature was 200° C., the argon gas pressure was 2 Pa during sputtering, and the substrate was rotated at a rate of 12 revolutions / min during the sputtering process.
[0030] 3) After the final...
Embodiment 2
[0034] 1. Preparation method
[0035] 1) First, clean the Si substrate in an alcohol solution using an ultrasonic cleaning device, and dry it with compressed air. Use tweezers to place the cleaned and dried glass substrate on the sample base of the sputtering chamber; wait until the vacuum at the back of the sputtering chamber reaches 5 ×10 -5 At Pa, a layer of MgO inductive layer was deposited on a clean glass substrate with a thickness of 10 nm by radio frequency magnetron sputtering technology.
[0036] 2) Then continue to alternately deposit FePt (2nm) and MgO (2nm) on this induction layer to obtain [FePt(2nm) / MgO(2nm)] 10 Multi-layer film, in which there are 10 layers of FePt thin film and MgO thin film; when sputtering FePt layer and MgO layer, the substrate temperature is 400°C. Argon gas pressure was 20 Pa during sputtering. During sputtering, the substrate was rotated at a rate of 20 rpm.
[0037] 3) After the final sputtering, the substrate is naturally cooled to...
Embodiment 3
[0042] 1. Preparation method
[0043] 1) First, clean the glass substrate in an alcohol solution using an ultrasonic cleaning device, and dry it with compressed air. Use tweezers to place the cleaned and dried MgO substrate on the sample base of the sputtering chamber; wait until the vacuum at the back of the sputtering chamber reaches 0.7 ×10 -5 At Pa, a layer of orientation (200) MgO induction layer was deposited on a clean glass substrate by radio frequency magnetron sputtering technology, and its thickness was 2nm.
[0044] 2) Then continue to alternately deposit FePt (5nm) and C (5nm) on this induction layer to obtain [FePt(5nm) / C(5nm)] 2 Multi-layer film, including 2 layers of FePt thin film and C thin film. When sputtering the FePt layer and the C layer, the substrate temperature was 100° C., the argon gas pressure was 10 Pa during sputtering, and the substrate was rotated at a rate of 30 rpm during the sputtering process.
[0045] 3) After the final sputtering, the ...
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