Solid chemical micro-thruster

Abstract

The invention discloses a solid chemical micro-thruster and belongs to the field of micro-propulsion technology and MEMS (micro-electro mechanical systems). The micro-thruster is formed by bonding of a silicon wafer and heat resistant glass, surfaces 2 of an upper silicon wafer 1 concave inward to form a combustion chamber 4 and a nozzle 3, a throat at a communication position of the combustion chamber 4 and the nozzle 3 is an arc with the curvature radius R, and a lower glass sheet 7 is formed by the heat resistant glass 8 and an ignition circuit structure on the heat resistant glass 8. The solid chemical micro-thruster has the advantages that ignition grooves are in the form of straight lines, and accordingly difficulty of silicon glass bonding is lowered by the aid of the straight line type ignition grooves under the conditions of the same ignition groove width and bonding area; the throat is the arc with certain curvature radius and is tangent to a boundary of a gas inlet and a gas outlet, so that a gas boundary layer is reduced while thrust of a device is enhanced; and the contact area of an igniter designed by a plurality of resistors in parallel connection and a propellant is increased, a heating area is enlarged, function failure of the whole device caused by fusing of one igniter is avoided, and reliability of the igniter is improved.

Description

[0001] Field: [0002] The invention relates to a micro-solid chemical propulsion device, which is used for position maintenance, attitude control, gravitational compensation, orbit adjustment, etc. of a micro-space vehicle, and belongs to the fields of micro-propulsion technology and micro-electromechanical systems (MEMS). Background technique: [0003] The propulsion system is a key subsystem of most spacecraft, mainly used for position keeping, attitude control, gravitational compensation and orbit adjustment of the spacecraft. With the continuous maturity of micro-spacecraft, such as micro-satellites, nano-satellites, and pico-satellites, if micro-spacecraft are required to complete certain special tasks, such as satellite formation flight, these micro-spacecraft need to be equipped with propulsion systems. Because the traditional propulsion system is relatively large in size and mass, it cannot be applied to micro-spacecraft. Therefore, there is an urgent need for a micro...

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Problems solved by technology

[0005] The purpose of the present invention is: to overcome the shortcomings of the silicon-glass bonding process in the existing micro-propulsion technology that is difficult, the gas boundary layer is too large to increase the thrust and the reliability of the igniter is low. Pyrex forms tiny propellers through bonding process

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