Preparation method of high-temperature oxidation-resistant ReAl coating
A high-temperature anti-oxidation and coating technology, applied in coating, metal material coating process, ion implantation plating, etc., to achieve good aerodynamic performance, easy control of beam spot size and position, precise control of film thickness and uniformity sexual effect
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Embodiment 1
[0014] Melt Re metal and Al metal with an atomic ratio of 1:1 into an alloy rod with a diameter of 68 mm and a length of 200 mm; put the alloy rod into an electron beam physical vapor deposition vacuum chamber, and control the vacuum degree of the vacuum chamber at 2× 10 -2 Pa, deposited at a rate of 0.3μm / min. In order to obtain better bonding strength and coating structure morphology, the substrate temperature was controlled at about 850°C during deposition, and the coating thickness was controlled at about 60μm. After the sample cools down, put it into the furnace for heat treatment in vacuum. The treatment process is as follows: the heating rate is 3°C / min., and the vacuum degree is controlled at (2-5)×10 -2 Pa, heat preservation at 1050°C for 4 hours, and after cooling in the furnace, the required new high-temperature oxidation-resistant coating can be produced.
Embodiment 2
[0016] Melt Re metal and Al metal with an atomic ratio of 1:1 into an alloy rod with a diameter of 70 mm and a length of 220 mm; put the alloy rod into an electron beam physical vapor deposition vacuum chamber, and control the vacuum degree of the vacuum chamber at 2× 10 -2 Pa, deposited at a rate of 0.2 μm / min. In order to obtain better bonding strength and coating structure morphology, the substrate temperature was controlled at about 800 °C during deposition, and the coating thickness was controlled at about 55 μm. After the sample cools down, put it into the furnace for heat treatment in vacuum. The treatment process is as follows: the heating rate is 3°C / min., and the vacuum degree is controlled at (2-5)×10 -2 Pa, heat preservation at 1050°C for 4 hours, and after cooling in the furnace, the required new high-temperature oxidation-resistant coating can be produced.
Embodiment 3
[0018] The Re metal and Al metal with an atomic ratio of 1:1 were smelted into an alloy rod with a diameter of 65 mm and a length of 180 mm; the alloy rod was placed in an electron beam physical vapor deposition vacuum chamber, and the vacuum degree of the vacuum chamber was controlled at 2×10 -2 Pa, deposited at a rate of 0.5 μm / min. In order to obtain better bonding strength and coating structure morphology, the substrate temperature was controlled at about 900 °C during deposition, and the coating thickness was controlled at about 65 μm. After the sample cools down, put it into the furnace for heat treatment in vacuum. The treatment process is as follows: the heating rate is 3°C / min., and the vacuum degree is controlled at (2-5)×10 -2 Pa, heat preservation at 1050°C for 4 hours, and after cooling in the furnace, the required new high-temperature oxidation-resistant coating can be produced.
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