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Microbiological detecting device

A detection device and microbial technology, which is applied in the field of resources and environment, can solve the problems of different carrier transmission, electrical signal changes, and different polarization capabilities, so as to save manpower and material resources and improve work efficiency.

Inactive Publication Date: 2012-08-29
GANNAN NORMAL UNIV
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Problems solved by technology

More precisely, different targets on the detection area have different polarization capabilities, and different polarization capabilities have different ability to regulate carrier transport, resulting in changes in the electrical signal between the source and drain.

Method used

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Embodiment Construction

[0012] In order to understand the present invention more clearly, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0013] The processing method of the chemical polarization field effect sensor designed in the present invention sees figure 2 , mainly including the following process and steps:

[0014] 1) choose n + -p - Type (100) oriented monocrystalline silicon as the substrate material;

[0015] 2) On the surface of p-type silicon, grow silicon dioxide layer SiO by chemical vapor deposition CVD or thermal oxidation 2 ①;

[0016] 3) Lithograph the first layer mask 1#, make the vertical groove structure ②, and form the conductive channel thin layer n of the depletion device by impurity doping - layer (impurity phosphorus);

[0017] 4) Make a sensitive gate dielectric film with a structure of silicon dioxide and silicon nitride (SiO 2 +Si 3 N 4 ) ④, and fill the gate groove with p...

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Abstract

The invention belongs to the field of resource and environment, and particularly relates to a microbiological detecting device, which mainly consists of two parts, namely, a chemical polarization field effect sensor and a detecting system. The microbiological detecting device adopts the working principle that the chemical polarization action of a to-be-detected object is mainly used for inducing the semiconductor layer as the substrate to be polarized, so as to adjust the transmission of the carriers in the semiconductor layer and consequently control the change of the output signals between a control source and a drain electrode. The detecting device can be controlled through a computer and can continuously monitor the to-be-detected object in real time. The detecting device can be used for monitoring and investigating the microbes as schistosome, plasmodium and clonorchis sinensis.

Description

Technical field [0001] The invention belongs to the field of resources and environment, and relates to a device for detecting microorganisms by using the principle of chemical polarization field effect, which can detect and identify schistosome cercariae and other microorganisms. Background technique [0002] At present, the field monitoring of microorganisms such as Schistosoma cercariae, Clonorchis, and Plasmodium mainly uses optical microscopes for naked eye observation. This detection technology cannot be separated from manual work, and it is still very difficult to realize real-time automatic monitoring. In addition, this method is an intermittent detection method, and the large-scale detection cycle is long, which requires a lot of manpower and material resources, and cannot detect the epidemic in time. [0003] The field effect sensor is an important member of the current sensor family. The traditional field effect sensor is usually composed of source, drain and gate...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/26H01L21/8232
CPCY02A50/30
Inventor 范小林曾祥志李勋谢应茂袁寿财
Owner GANNAN NORMAL UNIV
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