Holographic exposure device of any groove grating structure and exposure method thereof
A technology of grating structure and exposure device, applied in the field of holographic exposure, can solve the problems that the actual jitter of interference fringes cannot be well reflected, and the jitter of moiré fringes is not obvious, so as to reduce production time, be easy to implement, and have strong feasibility. Effect
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[0028] The invention discloses a method for producing arbitrary groove-shaped gratings by synthetic exposure method. First, according to the idea of Fourier decomposition, the grating grooves to be synthesized are decomposed into the algebraic sum of several sinusoidal grooves, and each group of sinusoidal grooves is This is achieved with a set of interference fringe exposures. If the first three sinusoidal groove shapes are approximated, then three sets of interference fringes are used in the scheme to expose at the same time, and the holographic grating with the desired groove shape can be obtained after development.
[0029] figure 1 A schematic diagram of an optical path for making an arbitrary groove-shaped grating by a synthetic exposure method, which is an example of an optical path for making an arbitrary groove-shaped grating by a synthetic exposure method, and does not limit the claims of the present invention. The light beam emitted by the laser 1 passes through ...
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