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Holographic exposure device of any groove grating structure and exposure method thereof

A technology of grating structure and exposure device, applied in the field of holographic exposure, can solve the problems that the actual jitter of interference fringes cannot be well reflected, and the jitter of moiré fringes is not obvious, so as to reduce production time, be easy to implement, and have strong feasibility. Effect

Inactive Publication Date: 2012-08-15
UNIV OF SHANGHAI FOR SCI & TECH
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  • Abstract
  • Description
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Problems solved by technology

[0004] Chinese invention patent CN200610039967.6 proposes a device for locking interference fringes during holographic exposure. However, this device uses a reference grating to observe the moiré fringes between the interference fringes and the reference grating to judge the vibration of the interference fringes. , belongs to indirect measurement; in addition, the interference optical path placed on the experimental platform vibrates with the reference grating at the same time, so the Moiré fringe jitter is not obvious, which cannot well reflect the actual jitter of the interference fringe

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  • Holographic exposure device of any groove grating structure and exposure method thereof
  • Holographic exposure device of any groove grating structure and exposure method thereof
  • Holographic exposure device of any groove grating structure and exposure method thereof

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Embodiment 1

[0028] The invention discloses a method for producing arbitrary groove-shaped gratings by synthetic exposure method. First, according to the idea of ​​Fourier decomposition, the grating grooves to be synthesized are decomposed into the algebraic sum of several sinusoidal grooves, and each group of sinusoidal grooves is This is achieved with a set of interference fringe exposures. If the first three sinusoidal groove shapes are approximated, then three sets of interference fringes are used in the scheme to expose at the same time, and the holographic grating with the desired groove shape can be obtained after development.

[0029] figure 1 A schematic diagram of an optical path for making an arbitrary groove-shaped grating by a synthetic exposure method, which is an example of an optical path for making an arbitrary groove-shaped grating by a synthetic exposure method, and does not limit the claims of the present invention. The light beam emitted by the laser 1 passes through ...

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Abstract

The invention discloses a holographic exposure device of any groove grating structure and an exposure method thereof. The device comprises a laser and a main beam splitter, wherein a beam emitted by the laser is divided into a plurality of beams of light paths through the main beam splitter; each beam of light path passes through a sub-exposure unit; and the sub-exposure unit comprises an adjustable optical attenuator, a beam splitter, a first reflector, a second reflector, a first collimating beam expander, a second collimating beam expander, a rotary platform, piezoelectric ceramic and a driver, a microscope objective set, a CCD (Charge Coupled Device) receiver and a driving circuit, a data acquisition card and a computer. According to the holographic exposure device and the exposure method thereof, holographic manufacturing of any groove grating can be realized by using the idea of Fourier decomposition. A CCD is arranged in the device, so that a vibration drift condition of an interference fringe can be reflected in real time, the piezoelectric ceramic is driven thereby, the locking of the interference fringe is realized, the influence of fringe jitter on long-term exposure is avoided, meanwhile, the phase of each group of interference fringes is accurately controlled according to information on the interference fringes after beam expansion, and matching and superposing of a plurality of groups of interference fringes are realized.

Description

technical field [0001] The present invention relates to a holographic exposure device, in particular to a holographic exposure device with any groove-shaped grating structure based on Fourier synthetic exposure; exposure method. Background technique [0002] Diffraction gratings are the most commonly used spectroscopic devices in spectroscopic instruments, and can be generally divided into ruled gratings and holographic gratings according to their fabrication methods. Scribing gratings is to use a diamond stylus to carve grooves on the grating substrate coated with aluminum film in a non-cutting way to form a grating. The angle of the diamond stylus determines the groove shape of the scribing grating. It takes a long time to mark a master grating by a grating marking machine, usually several days and nights, so the requirements for the environment constant temperature and anti-vibration system are very high, otherwise the thermal expansion of the material and mechanical vib...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/20G02B5/18G03H1/12
Inventor 凌进中黄元申王振云王琦裴梓任韩朝霞张大伟庄松林
Owner UNIV OF SHANGHAI FOR SCI & TECH
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